Mounting: L (Axial Foot), Bore Size: 12mm equiv., Stroke: 50mm, Connector: Z (w/o Connector)

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～1.0, Specification: Built-in magnet, Auto Switches: Without

1

Cable 0.3 mm2 x 25 cores O.D. 1.4 Lead wire color Dot marking Terminal no.

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

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How to Order MHZ Bore size MHF MHS 3 D 20 16 to 25 M9N MHL Number of auto switches MHR Nil S 2 pcs. 1 pc.

Aluminum High Vacuum Angle Valve

VMQ FKM for Plasma ULTIC ARMOR Example) XLD-25-M9NA-XAN1A U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 448 XLD/XLDV Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] G XLDV M9N A L 1 25 !

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CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

Free Mount Cylinder

32 40 50 10 16 25 40 8 10 13 16 20 25 32 40 4 6 6 50 Dia.

ISO Cylinder

air cushion is 25 mm.

Table of Contents

) 20 are 20 are and 25 sizes newly added. and 25 sizes newly added.

High Vacuum Angle Valve

For portable equipment not requiring air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

How to Order M9N A 25 XMD XYD Angle type M9N A 25 In-line type 1 2 3 4 5 6 7 2. Flange type 1. Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø50 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 25 mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø25 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 25 mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø32 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 25 mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø40 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 25 mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal