A

) Allowable Kinetic Energy 10 0.30lbf in (0.35kgf cm) 16 0.78lbf in (0.9kgf cm) D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

IDX-OM-W023

CM FM1 C11 PRS FM1 PRS P P FM2 C12 FM2 IDU11E-10 PC CM FM1 FM2 OLR ILS ILS PRS PTC OLR PTC PTC C01 C01 CM C11 C12 TB PC FM1 PRS P FM2 IDU Series 6-4 6 5 IDX-OM-W023 6 IDU15E1-10 PC ILS CM FM1 OLR PTC FM2 OLR ILS CM C01 C02 PTC PTC PRS CR PC C11 CR CR FM1 PRS C01 P C12 C02 FM2 C11 C12 IDU15E1-20/23 PE N L TB ILS CM OLR FM1 PTC FM2 OLR CM ILS PTC PTC CR PRS

Series VQ Base Mounted Metal Seal/Rubber Seal

Stations Cylinder ports 1 station 01 Port size Symbol 16 stations (1) 16 C3 C4 C6 M5 CM One-touch fitting for 3.2 Note1) Refer to p.1.10-198 for details.

HRX-OM-W060

) Analog output signal 2 Output 2 CH2 electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V By default.

IDX-OM-W029

GFCI R R GFCI R GFCI TB TB PRR PRR PRR MC1 THS MC1 CM MC1 CM FM1 M FM2 MC2 FM2 MC2 P PRS FM1 P P IDU75E-30 M For Option R GFCI R GFCI TB CM FM1 () FM2 PRR MC1 MC1THR MC2 C11 CM PRS OLR MC2 PRS1 PRS2 ILS THR THS FM2 THS CM THP1 THP2 OLP1 1 OLP2 1 THP1 FM1 THP2 FM2 OLR PRR THR PRS2 P PRR P TB GFCI MOV M IDU Series 6-4 6 4 IDX-OM-W029 6 6-5 IDU55E,75E IDU55E,75E IDU75E

MB1

Z (Example) Y69BZ Solid state auto switches marked with a "" are produced upon receipt of order. 1 Standard Type Double Acting: Single Rod Series MB1 Specifications 1MPa: Approx. 10.2kgf/cm Bore size (mm) 32 40 63 100 50 80 Type Non-lube type Action Double acting single rod Air Fluid 1.5MPa {15.3kgf/cm} Proof pressure 1.0MPa {10.2kgf/cm} Maximum operating pressure 0.05MPa {0.5kgf/cm} Minimum

IDX-OM-W011

P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11 FM P (BK) IDF15E1-10 PC CM ILS FM PTC OLR OLR ILS PTC PTC CM C01 C02 PRS PC C01 C02 C11 FM C11 PRS P IDF Series 6-4 6 5 IDX-OM-W011 6 IDF15E1-20 L PE N TB ILS CM FM PTC OLR OLR ILS CM PTC PTC PRS TB C11 C11 FM PRS P IDF Series 6

Square Tube Type Air Cylinder Series MB1

Z (Example) Y69BZ Solid state auto switches marked with a "" are produced upon receipt of order. 1 Standard Type Double Acting: Single Rod Series MB1 Specifications 1MPa: Approx. 10.2kgf/cm Bore size (mm) 32 40 63 100 50 80 Type Non-lube type Action Double acting single rod Air Fluid 1.5MPa {15.3kgf/cm} Proof pressure 1.0MPa {10.2kgf/cm} Maximum operating pressure 0.05MPa {0.5kgf/cm} Minimum

IDX-OM-O004C

CM CM C02 C01 C11 C11 FM FM PRS PRS P P CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB GFCI 12 3 13.S S 13 13.1 13.2 IDF15E1-20 L N PE M3 6.5mm 1.25mm 2 13 1 13.S 13.3 IDF15E-10-S PE N L TB CM ILS FM PTC OLR OLR ILS PTC PTC CM PRS C01 C02 TB C01 C02 C11 FM C11 PRS P 13 2 14.T T 14 14.1 IEC 14.2 AC200V, 1A (AC10mA, DC30mA) 14.3 ON 3 () 5 /1 () 14 1 14.T 14.4

PSxx-OMV0008CN

= (Pr b) / a Pr PD a b [] a b MPa 0.00025 -0.25 kPa 0.25 -250 kgf/cm 2 0.00254925 -2.54925 ISE70G bar 0.0025 -2.5 psi 0.03626 -36.26 MPa 0.0005 -0.5 kPa 0.5 -500 kgf/cm 2 0.0050985 -5.0985 ISE75G bar 0.005 -5 psi 0.07252 -72.52 MPa 0.00125 -1.25 kgf/cm 2 0.0127475 -12.7475 ISE76G bar 0.0125 -12.5 psi 0.1813 -181.3 MPa 0.0025 -2.5 kgf/cm 2 0.0254925 -25.4925 ISE77G bar 0.025 -25 psi 0.3626

•

4D 4P Ii) I I NBR NLP-40 Piston packing NLP-SO NLP-63 I: NBR CM-040-16-127 Tube gasket CM-OSO-16-1 28 CM-063-16-129 I Plastic C1AOSO-07-306 C1A040-07-30S Wear ring C1A063-07-307 NBR Cushi9n packing A MC-2S $ I MC-25 NBR . Cushlb!')'p8cking B MC-20 MC-20 "qr .,. Gasket tor GusHi<:>n va 've. NBR CK40-1697 !

42

(Except L kit) Cylinder port 03 3/8 04 1/2 B Bottom ported 1/2 CM Mixed Note) Kit/Electrical entry/Cable length F L Kit (D-sub connector) Kit (Lead wire cable) Note) In case of mixed specification, indicate on the manifold specification sheet.

Thermo-chiller

Applicable model HRL-DI002 HRLE050-m-m HRL-DI001 HRLE090-m-m Measurement range of electric conductivity 2.0 to 48.0 S/cm Set range of target electric conductivity 0.5 to 45.0 S/cm Set range of electric conductivity hysteresis 0.1 to 10.0 S/cm !0 o Operating temperature range (Circulating fluid temperature) 5 to 60C !4 Power consumption 400 mA or less !

MNB

Lock Specifications Lock actuation Spring lock (exhaust lock) Unlocking pressure 0.25MPa{2.5kgf/cm} or more Locking pressure 0.20MPa {2.0kgf/cm} or less Maximum operating pressure 1.0MPa {10.0kgf/cm} Locking direction Two-way For cases with auto switches, refer to the table of minimum strokes for mounting of auto switches on page 12.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Example: -BNR CM Note 2) Note 3) MM Note 4) Mixed size for different types of piping, option installed Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type. Example) B6 (Bottom ported elbow with 6 one-touch fitting) Note 2) Indicate LM for models with elbow fittings and mixed cylinder port sizes.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Example: -BNR CM Note 2) Note 3) MM Note 4) Mixed size for different types of piping, option installed Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type. Example) B6 (Bottom ported elbow with 6 one-touch fitting) Note 2) Indicate LM for models with elbow fittings and mixed cylinder port sizes.

EXxx-OMY0006CN

SW3 SW3 CM()SM() Table 10-29 SW3 Bit 1 Bit 2 OFF OFF SM (Safety mode) ON OFF OFF ON ON ON CM (Commissioning mode) SW3 DIP SMGSDML(Step7/TIA)/FDCML(PCWorx)Safe digital I/O (SM)CMSafe digital I/O (CM) 8.1.1 GSD CM1byte CM CM Table10-30, 10-31, 10-32 SM CM IO Table 10-30 COMNG_MODE I/O Byte 0 CN0-3 Zone M,Zone1-3 Byte 0 of COMNG_MODE Table 10-31 COMNG_MODE Bit 0 0 Zone M

Air Cylinder CLA Series Fine Lock Model

Be sure to set regulator@ 3.5 kgf/cm':or more for spring with air pressure lock-up and 1 kgf/cm'?or more for Air pressure lock-up Sol A, B & C accept direct-operated type or pilot operated type.

VQ5000

Note) In case of CM indicate on a specification sheet.