Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 80, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 120, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 160, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 320, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 400, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～1, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Table of Contents

0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

CATALOG

/ 14 to 122F -10 to 50C / 14 to 122F Max Operating 2 Position S & D 20Hz 5Hz OR CONTACT YOUR LOCAL SMC REPRESENTATIVE.

2

Inlet air temperature 5 to 50C IDF (For IDF100F to 150F, up to 60C is allowed.)

Proposals for Energy Saving

Note 2) Power supply 12 months continuous operation (without back lighting) Battery life 250ms Response speed 2% F.S. or less (Temperature conditions: at 25C) Display accuracy 1% F.S. or less (Temperature conditions: at 25C) Repeatability 3% F.S. or less (0 to 50C, based on 25C) Temperature characteristics M5 x 0.8 Piping port 0 to 50C (with no condensation) Ambient temperature 35 to 85%

V

Double Max 10ms Max 15ms 3-position Max 20ms Max 25ms Life 200 million cycles or more Ambient and Fluid Temperature ( N o t e 3 ) -10 to +50C (14~122F) -5 to +50C (23~122F) Lubricant ( N o t e 4 ) Not required Not required Manual Override Non-locking, Push Non-locking, Push Protection Dustproof Dustproof ( N o t e 2 ) Calculated on the basis of JIS B 8375-1981 (Supply pressure 0.5 MPa {5.1

Digital Flow Switches

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.

PF2A/PF2W

0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

Table of Contents

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

Digital Flow Switches, Series PF2A, Series PF2W

0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.

Series IDG

(23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM