Multi-channel Digital Sensor Monitor ( compatible)

For precise pressure detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -101No.PS-OMW0012-C Problem No.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

4-channel Flow Monitor ( compatible)

For precise flow detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -94No.PF-OMA1011-A Problem No.

LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Digital Flow Switch ( compatible)

Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -87No.PF-OMZ0002-A [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F Display letter 7seg 11seg Value (16 hex number) 10 11 12 13 14 15 16 17 18

PFxx-OMX0002

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes) before operation.

PFxx-OMX0007

measurement value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 OUT2 OUT1 Item Error output Reservation Flow Fixed diagnosis Reservation diagnosis Switch output The process data of this product is Big-Endian type.

Digital Flow Switch ( compatible)

Accumulated pluse output mode 16 Err mode 17 oFF mode 18 Flow bottom value 19 Flow peak value 20 Accumulated flow value 21 Switch output mode/communication mode display SIO mode/SDCI mode display -83No.PF-OMY0002 [Line name communication data] Value (16 hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F Display letter 7seg 11seg Value (16 hex number) 10 11 12 13 14 15 16 17 18 19

I

NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?) Arntient and tluid temperatureMax .120'F(Max. 50'C) Respon time 2 poitl'| slngle/doubb 20ms or less at 75 PSI (skg/cm'?) 3 pcition 40ms or less at 75 PSI (skgf/cm'?)

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

3M/SMseries

locking type, Knob locking type Mounting positionFree lmpact/Vibration resistance-30G/sc (8.3 -200OHz) Enclosure -Dust Proof Pilot exhaust-lndividual exhaust, Common exhaust for main valve and pilot valve Solenoid Specifications Electrical entry-Grommet, Grommet terminal, Conduit terminal, DIN connector Vohages AC 11O,22O, 12,24,48,240V so/aoHz DC 24, 6, 12,48, 100, 1 10V Vottage allowance 15

Made to Order

10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

1

Refer to page 8-15-24.

11-cq2-e

6 Single acting, spring return Piston seal CQ2B12-S-PS Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS CQ2B16-S-PS Gasket CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size.

11-cqp2-e

4 Pneumatic type (non-lube) Piston seal Rod seal NBR CQ2B12-PS 12 16 20 25 32 40 50 63 80 100 CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS CQ2B16-PS Gasket CQ2B20-PS CQ2B25-PS CQ2B32-PS Set of left nos. !2, !3, !4.

Compact Cylinder/Axial Piping: Double Acting, Single Rod Series CQP2

4 Pneumatic type (non-lube) Piston seal Rod seal NBR CQ2B12-PS 12 16 20 25 32 40 50 63 80 100 CQ2B12-PS CQ2B16-PS CQ2B20-PS CQ2B25-PS CQ2B32-PS CQ2B40-PS CQ2B50-PS CQ2B63-PS CQ2B80-PS CQ2B100-PS CQ2B16-PS Gasket CQ2B20-PS CQ2B25-PS CQ2B32-PS Set of left nos. !2, !3, !4.

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

Air Cylinder

Operating Pressure 15 psi (1.05 kgf/cm2) Min.