smcmaintenancepartslist

differential pressure Element 5 elements included Number of elements Size Filtration area 190 x L440 1800 cm2 190 x L770 3400 cm2 190 x L440 5400 cm2 190 x L770 10200 cm2 190 x L440 9000 cm2 190 x L770 17000 cm2 267 Bag Filter Series FGF P.478 2 Replacement Procedure is Replacement Parts and Seal List FGF1 FGF3-40 FGF5-60 Air release Davit for cover Spring washer Nut Air release Fluid release

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18

Air Slide Table

Weight [g] Model Standard stroke [mm] Reduction of the shorter Additional weight of adjuster option Extra for option 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Buffer End lock Axial piping MXQ6 120 120 160 180 190 6 10 8 30 40 total length type MXQ8 150 180 190 230 310 350 6 10 8 30 60 MXQ12 290 310 340 400 430 590 670 12 20 16 70 80 MXQ16 500 520 570 650 690

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

229 40 Cylinder stroke (mm) 117 129 141 153 166 178 190 202 214 300 361 50 Allowable lateral load for rod end (Single rod, without switch) 153 165 177 190 202 214 226 239 251 337 398 63 With Auto Switch 270 289 308 327 347 366 385 404 423 557 653 80 1038 487 515 543 570 598 625 653 681 708 901 100 200 (g) Table (3) Weight of Cylinder Movable Parts/With Built-in Magnet 100 Cylinder stroke

High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

CQ2

X 175 l -100DC Construction -100DC X 190 l X 200 l Double acting/Single rod Rod end male thread Component Parts Replacement Parts: Seal Kits Bore size (mm) Kit No.

Table of Contents

Connection port location Rotating angle Nil E Side ported Axial ported Classification Symbol Single vane Double vane 90 100 90 180 270 100 190 280 90 180 270 100 190 280 Standard Bolt Option Vane type S D Single vane Double vane A port B port B port A port Side ported Axial ported Body end of the short-shaft side Applicable Auto Switch/Refer to page 11-11-1 for detailed auto switch switches

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K X [mm] LEYGlM (Sliding bearing) [mm] LEYGlL (Ball bushing bearing) Size Stroke range (mm) L DB Size Stroke range [mm] L DB (0.5) Section XX 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 25 15 to 110 91 10 115 to 190 115 195 to 300 133 Z WB WA WC + Stroke 32 20 to 55 74 16 60 to 185 107 190 to 300

Refrigerated Air Dryers

IDU-FL218 IDU75E 610 560 190 735 515 265 A filter set for the IDU-FL210 to 212, 215 to 218 consists of 2 filters. [mm] Dimensions Part no.

15

Size Stroke range [mm] L DB Size Stroke range [mm] L DB 25 Up to 110 91 10 115 to 190 115 195 to 300 133 25 Up to 55 67.5 12 60 to 185 100.5 190 to 300 138 32 Up to 110 97.5 13 115 to 190 116.5 195 to 300 134 32 Up to 55 74 16 60 to 185 107 190 to 300 144 LEYGlM, LEYGlL Common [mm] Size Stroke range [mm] B C DA EA EB EH EV EC ED G GA H J K M NA NB Up to 35 89.5 50 20 46 85 103 52.3 11 12.5

air-filter-e

differential pressure Element 5 elements included Number of elements Size Filtration area 190 x L440 1800 cm2 190 x L770 3400 cm2 190 x L440 5400 cm2 190 x L770 10200 cm2 190 x L440 9000 cm2 190 x L770 17000 cm2 267 Bag Filter Series FGF P.478 2 Replacement Procedure is Replacement Parts and Seal List FGF1 FGF3-40 FGF5-60 Air release Davit for cover Spring washer Nut Air release Fluid release

Air Preparation Equipment

differential pressure Element 5 elements included Number of elements Size Filtration area 190 x L440 1800 cm2 190 x L770 3400 cm2 190 x L440 5400 cm2 190 x L770 10200 cm2 190 x L440 9000 cm2 190 x L770 17000 cm2 267 Bag Filter Series FGF P.478 2 Replacement Procedure is Replacement Parts and Seal List FGF1 FGF3-40 FGF5-60 Air release Davit for cover Spring washer Nut Air release Fluid release

ISO Cylinder

50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5) 113.5 (117) 129 (132.5) 111 (114.5) 126.5 (130) 142 (145.5) 20 62 112 137 95 145 170 115 165 190

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Connection port location Rotating angle Nil E Side ported Axial ported Classification Symbol Single vane Double vane 90 100 90 180 270 100 190 280 90 180 270 100 190 280 Standard Bolt Option Vane type S D Single vane Double vane A port B port B port A port Side ported Axial ported Body end of the short-shaft side Applicable Auto Switch/Refer to page 11-11-1 for detailed auto switch switches

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Connection port location Rotating angle Nil E Side ported Axial ported Classification Symbol Single vane Double vane 90 100 90 180 270 100 190 280 90 180 270 100 190 280 Standard Bolt Option Vane type S D Single vane Double vane A port B port B port A port Side ported Axial ported Body end of the short-shaft side Applicable Auto Switch/Refer to page 11-11-1 for detailed auto switch switches

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

190 190 190 1 2 3 7 Operating angle m: Converts the operating range (Lm) of the auto switch into the rotation angle Angle of hysteresis: The hysteresis of the auto switch is converted to degrees.

Aluminum High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

Rotary Cylinder Series MRQ Size: 32, 40 1

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

70astamb1

190 238 238 9 9 10.5 10.5 12.5 12.5 42 42 53 53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

mb1

190 238 238 9 9 10.5 10.5 12.5 12.5 42 42 53 53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.