ISO Cylinder

to 50 st 51 to 100 st 101 to 150 st Auto switch model Bore size A dimensions B 5 to 50 st 51 to 100 st 101 to 150 st 8 18.5 18.5 18.5 6.5 10 16.5 16.5 16.5 6.5 12 18 18 18 7.5 8 17 17 17 5 10 15 15 15 5 12 16.5 16.5 16.5 6 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 18 33.5 49 13.5 [7.5] 16 16.5 32 47.5 12 [6] 16 12.5 28 43.5 8 [2] 20 10.5 (35.5

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

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4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 766 AC Servo Motor Driver LECY M U Series Specifications -@ Type Model LECYM2-V5 LECYM2-V7 LECYM2-V8 Compatible motor capacity [W] 100 200 400 Compatible encoder

Air Cylinder

MB1 D-B59W 15 20 75 20 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-G39A Note 4) D-K39A D-A3lA D-A44A 10 35 100 35 + 30 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 3, 4, 5) CA2 CS1 CS2 Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Applicable Auto Switch Model

Internal Circuit RB Dimensions J Switch main circuit OUT() Brown D OUT( ) Blue -X 20Indicator light/Operation Technical Data Operation Range( l Dimension) (mm) Bore size 40 Actuator series 80 100 5 5 5 5 5.5 4 4 4.5 4 4.5 5 5 5 50 63 CDQ2 CDA1 MDL MK, MK2 5 5 5 5.3-64 2 Color lndication Style with Diagnostic Output Solid State Switch/Tie-rod Mounting D-F5LF (Latching Style) Applicable Actuator

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8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy

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[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

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100 89 153 5 69 21 105 Dimensions except mentioned above are the same as standard type.

Air Cylinder

10 40 67 4.5 66 86 5 17.5 22 11 75.5 63 Up to 1500 82.5 5 12 45 67 4.5 82 106 5 17.5 22 13 75.5 80 Up to 1500 101 6 11 55 74 4.5 100 125 5 20 28.5 14 95 100 Up to 1500 121 6 14 65 74 6 120 150 7 20 30 16 95 * Other dimensions are the same as basic type.

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Applicable shaft type: W d1 = (mm) (mm) Size d1 Q1 = M Size 63 80 100 50 50 4 to 5 Thread 63 4 to 6 M5 x 0.8 L1 = L1 4.2 4.2 4.2 80 4 to 6.5 M6 x 1 5 5 5 100 5 to 8 M8 x 1.25 6.8 Q1 11-4-14 80 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequecing II Shaft shape pattern is dealt with simple made-to-order system.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W d1 = (mm) (mm) Size d1 Q1 = M Size 63 80 100 50 50 4 to 5 Thread 63 4 to 6 M5 x 0.8 L1 = L1 4.2 4.2 4.2 80 4 to 6.5 M6 x 1 5 5 5 100 5 to 8 M8 x 1.25 6.8 Q1 11-4-14 80 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequecing II Shaft shape pattern is dealt with simple made-to-order system.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W d1 = (mm) (mm) Size d1 Q1 = M Size 63 80 100 50 50 4 to 5 Thread 63 4 to 6 M5 x 0.8 L1 = L1 4.2 4.2 4.2 80 4 to 6.5 M6 x 1 5 5 5 100 5 to 8 M8 x 1.25 6.8 Q1 11-4-14 80 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequecing II Shaft shape pattern is dealt with simple made-to-order system.

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting Position of the Heater Heater symbol XLm-100(-1)-X152 XLm-160(-1)-X152 H4 (100C) (b), (c) (a), (b), (c) H5 (120C) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 5 XLm-100/160(-1)-X152 Specific Product Precautions Be sure to read this before handling the products.

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-YB8 V V V V V V ZP3EA-YB12 V V V V V V V V Mounting nut w Seal washer (Sales unit: 5 pcs.) Part no.

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5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

10

indicator) 4-wire (NPN) 5 V, 12 V F59F V V v v IC circuit Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA V V V v P4DW V V v Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit 100 V A93 V V V V Reed auto switch No 100 V or less A90 V V IC circuit Grommet Relay, PLC Yes 100 V, 200 V A54 V V V No 200 V or less A64 V V 2-wire 24 V 12 V A33