Bearing Style: M (Slide Bearing), Bore Size: 32mm, Port Thread: TN (NPT), Piping: Standard Porting, Stroke: 40mm

Bearing Style: M (Slide Bearing), Bore Size: 32mm, Port Thread: TN (NPT), Piping: Standard Porting, Stroke: 50mm

Bearing Style: M (Slide Bearing), Bore Size: 32mm, Port Thread: TN (NPT), Piping: Standard Porting, Stroke: 30mm

Bearing Style: M (Slide Bearing), Bore Size: 32mm, Port Thread: TN (NPT), Piping: Standard Porting, Stroke: 10mm

Bearing Style: M (Slide Bearing), Bore Size: 32mm, Port Thread: TN (NPT), Piping: Standard Porting, Stroke: 100mm

Bearing Style: M (Slide Bearing), Bore Size: 32mm, Port Thread: TN (NPT), Piping: Standard Porting, Stroke: 75mm

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COM. () 20 COM.

Table of Contents

SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

20 20 1.

ISO Cylinder

GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

Rotary Actuator/Vane Type

, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Air Cylinder

10.5 40 41 46 20 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 27 10.5 Symbol Stroke (mm) With Air Cushion Boss-cut Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 25 8 20 M5 x 0.8 95 32 12 20 M6 x 1 97 40 13 21 M8 x 1.25 125 Bore size WA 20 13 25 13 32 13 40 16 Bore size ZZ Without With rod boot 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 103 130 143

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Made to Order

15 15 16 16 20 20 22 22 28 35 The standard stroke for 12 and 16 is 100 st.