Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1m, Number: -

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Piping: Standard, Bore Size: 10mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

1

dual 3-port valve Operating pressure range Internal pilot operating pressure range (MPa) 0.1 to 0.7 (High pressure type: 0.1 to 1) 100 kPa to 0.7 (4-position: 100 kPa to 0.6) 100 kPa to 0.7 (High pressure type: 100 kPa to 1) 2-position single 2-position double 3-position External pilot operating pressure range (MPa) Pilot pressure range 0.25 to 0.7 0.1 to 0.7 (High pressure type: 0.1 to

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

Table of Contents

100 Gripping point L (mm) Gripping point L (mm) Misc.

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.

Bore Size: 10mm, Port Thread: (M3 Thread-6)(M5 Thread-10~15mm)(Rc-20~63mm), Stroke: 400mm

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 50, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 60, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 65, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 80, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 100, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 120, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 130, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 134, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 150, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 10, Stroke(mm): 200, Max. Load Mass (Horizontal Mounting)(kg): 0.05~0.8, Table Size Length L(mm): 38, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Magnetic, Guide: [Guideless] Direct mounted, Table Size Width W(mm): 26, Table Size Height H(mm): 27, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General