Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

CQ2

8 174 54 125 62 150 72 17 7 40 10 to 50, 75, 100 151.5 125.5 6.6 151.5 176.5 150.5 9 176.5 67 125.5 76 150.5 89 18 8 50 Refer to p.2.3-18 for rod end nut and optional brackets.

CATALOG

15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

A

15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

Hydraulic

Nil (Example) A93 3m . L (Example) A93L 5m .

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod Anti-lateral Load 12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16

MY1

Mass mn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 350mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 250mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 350mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 200mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 250mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -