Electric Actuators

READY 23 System ready signal General purpose input/output terminal: CN2 Indicates that the SET-UP operation (start ready operation: return to home position after servo ON) is complete when ON. The state in which the program can be run. SET-ON 10 Start readiness signal CN2 24VDC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON.

Modular F.R.L. Units

-A C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A * Bowl seal is included for the AL20-A to AL60-A.

Compact Cylinder with Lock Series CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

CLQ

L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Vacuum Unit

VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

Table of Contents

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

Fluoropolymer Piping Equipment

LQ1T21-ST1-R39 6 Body size 3 6 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 3.6 LQ1T21-ST2-R41 Body size 3 6 6 20 41.1 36.5 LQ1T32-ST1-R37 8 Body size 3 8 5 20 20 9 18 17 17 17 36.5 41.1 36.5 23 23 23 5.5 LQ1T32-ST2-R40 Body size 3 8 8 20 41.1 36.5 LQ1T41-ST1-R1 12 Body size 3 12 24 24 21 17 21 34 41.5 34 28 23 28 5.8 LQ1T41-ST1-R37 12 Body size 5 12 24 24 21 26 21 39.5 52.5

Compact 5-Port Solenoid Valve

JSY3000: JSY31V-23-2A (2 pcs.) JSY5000: JSY51V-23-2A (2 pcs.) Manifold Options Base gasket * The body and plug-in spacer of the JSY1000 are separate. The connector gasket is not used.

Multi-Axis Step Motor Controller

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

MQQ

10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14 12 40 5.5 9 With rod end male thread/MQQ DM Rod end nut H1 (mm) Bore size (mm) L1 C1 H1 X 23.5 10.5 M5 x 0.8 15.5 10 26.5 11.5 M6 x 1.0 16.5 16 C1 28.5 13.5 M8 x 1.25 18.5 20 Rod end thread adapter X 34.5 16.5 M10 x 1.25 22.5

7.4

Applicable tube 2 KJH02-C1 Applicable tube 4 KJH04-C1 Applicable tube 1/8" KJH01-C1 Applicable tube 5/32" KJH03-C1 Fitting assembly * Part number is for one fitting assembly. Please order it in units of 10 pieces. 762 S0700 Series Specific Product Precautions 3 Be sure to read this before handling the products.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 4 I/O // JXC73/83 Series 1. . 5 2. . 7 2.1 . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 (1) . 11 (2) . 12 (3) . 13 3.6 . 14 (1) . 14 (2) . 17 (3) . 19 3.7 JOG . 20 (1) . 20 (2) . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 (3) . 24 (4) . 24 4. . 25 4.1 . 25 4.2 . 26 4.3 . 27 (1) . 27 (2) DIN . 27 4.4 . 28 (1

LEC-OM02904

(UVW) 6. 1. 2. 25 1. 23 2. 3. 4. 5. 6. 23 8 7 8 (2) 30 1. No.PA02 1 2. 1. 2. TM MR Configurator2 3. 3. 200V100VDC400V 400VDC800V 4. 4 5. 6. 1. 2. 7. 2 31 1. 2. 1. 2. 3. 4. 8 8 8 (2) 32 1. (UVW) 2. 1. 2. (UVW) 3. (UVW) 4. (UVW) 5. 1. 2. 6. 2 8 9 8 (2) 33 LECSS-DC400V 1. 2. No.PA02 00() 3. 1. 2. 4. 1. 2. 5. 7.

Rotary Actuator

Without air cushion With air cushion Air-hydro 50 P694020-20 P694020-21 P694020-23 63 P694030-20 P694030-21 P694030-23 80 P694040-20 P694040-21 P694040-23 100 P694050-20 P694050-21 P694050-23 Corresponding parts u, o, !0, !3 are included as a set. u, o, !0, !3, @3 are included as a set. u, o, !0, !3 are included as a set.

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

JXCx-OMT0001CN

No.JXC-OMT0001CN-C 4 TM) (EtherNet / IP // JXC93 Series 1. . 5 2. . 7 2.1. . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26

CATALOG

91 71 23 44 26 80 63 16.5 IS1000E-303 38 IS1000M-6 15 100 72.5 23 54 AC3000 IS1000E-304 12 40 80 63 17.5 *Without Yoke Clip.

A

23 11 MXF16 3.41 5.69 7.96 10 12 10 28 28 12 MXF20 6.66 9.14 13.70 18.27 11 17 11 34 34 17 *Note) 16mm only for MXF8-10.