ZP N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8 ZL ZP13UT ZP13CT 13 13 14 14 1.5 1 ZP16UT ZP16CT 16 16 17 17 ZY ZQ
250 262.5 275 287.5 287.5 300 312.5 L5 17 12 14 16 18 13 15 17 12 14 16 17 13 15 16 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 L1 299.8 308.8 317.8 326.8 L2 196.4 205.4 214.4 223.4 L3 323 335.5 348 360.5 L4 312.5 325 337.5 350 L5 12 14 15 17 50 JSY1000/3000/5000 Series Type 10/Side Ported Dimensions: JSY3000 Series Terminal Block Box
16 50 7 39 Up to 300 24 22 10 15 8 46.5 84.5 M14 x 1.5 21.5 42.5 32 0 0.039 20ZZ S U Z NN Q QY RR Bore size (mm) Data 20 25 32 40 133 142 19.8 14 9 62 14 M20 x 1.5 9 62 14 137 146 M26 x 1.5 22 14 14 139 148 16 9 64 M26 x 1.5 25.8 188 88 18 177 M32 x 2 29.8 16 11 10-15-23 24 Series CVM5 Double Clevis Style (D) Bore size Stroke CVM5D Manual override Width across flats B1 CD hole H10 Rod d9
39 14 7 21 15 84.5 24 42.5 10 46.5 Up to 300 21.5 22 8 M14 x 1.5 32 0 0.039 20ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 Data 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 10-15-23 24 Series CVM5 Double Clevis Style (D) Bore size Stroke CVM5D Manual override Width across flats B1 CD hole H10 Rod d9
16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 10 12 16 20 25 16 19 23 28 36 1/4 3/8 3/8 1/2 1/2 15 18 25 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 84 90 98 116 126 94 100 108 126 136 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5
3/16" 1/4" 1/8", 5/32" 3/8" 1/2" 5/32" 3/16" 1/4" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" ASF Flow rate (l/min (ANR)) 1050 100 130 290 660 1390 420 920 230 460 Controlled flow (Free flow) Effective area (mm 2) 16 1.5 2 4.5 10 21 6.5 14 3.5 7 Note) Flow rate values are measured at 0.5 MPa and 20C.
16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 5 5.5 5.5 6 7 7 10 10 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35
Unit Air Filter + Regulator + Lubricator AC10 to 60 Page 14-2-5 Filter Regulator + Lubricator AC10A to 40A Page 14-2-16 Air Filter + Regulator AC10B to 60B Page 14-2-18 Air Filter + Mist Separator + Regulator AC20C to 40C Page 14-2-20 Filter Regulator + Mist separator AC20D to 40D Page 14-2-22 Attachment Specifications Page 14-2-24 Spacers and Brackets: Accessory Page 14-2-29 Made to Order
16 20 20 25 30 36 36 40 59 67 73 77 85 112.5 121 133 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 M14 X 1.5 M14 X 1.5 M16 X 1.5 40 50 55 65 80 90 90 90 6 7 7 11 11 15 15 17 32 40 40 52 52 14 18 18 22 26 31 31 36 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 11 11 11 11 11 16 16 18.5 60 70
across flat 14 Buffer Applicable Pad List 5 5 5 15 10 Mounting Adapter Part No. 2 2 2 14 13 8.4 1.8 11 10 6 1.8 17 16 11.4 1.8 Buffer Assembly Part No. 14 Series ZP3 How to Order Vertical vacuum inlet/ With buffer ZP3 T 015 U J 3 B3 N Vacuum inlet direction Symbol Vertical Direction T Pad diameter Symbol Pad diameter 015 02 035 04 06 08 10 13 16 1.5 2 3.5 4 6 8 10 13 16 Vacuum inlet (@)
COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon
105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17 199.5 16 273 262.5 249.6 11.5 210 L1 L2 L3 L4 L5 19 19 Series SV EX500 Decentralized Serial Wiring Dimensions: Series SV2000 for EX500 Decentralized Serial
16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100
A: Orange B: Green 12 13 14 15 16 17 12 13 Stations n 10 stations 11 12 13 14 15 16 stations 298 310.5 323 335.5 335.5 348 360.5 L1 L2 L3 L4 287.5 300 312.5 325 325 337.5 350 (Rail mounting hole pitch 12.5) 192 202.5 213 223.5 234 244.5 255 14 15 16 17 11.5 12.5 13.5 1-6-125 126 SX5000: Serial Transmission Unit/Plug-in C4 C6 C8 SS5X5-45S2DStations UDIN rail release button (Pitch)P = 16 Note
Rc 1/16 Rc 1/8 G 14 12.5 16 19 23 NC 14 17.5 20 25 30.5 VV 10 12.5 16 19 23 PP 7.5 11.5 12 17 18.5 WW 7.5 10.5 12.5 16 19.5 QQ 9 11 16 16 24 XX 22 24 28 32 36 TT 9 10.5 14.5 16 20 RR 11 14.5 16 23 27 UU 10.5 12 15 16 22 SS 3 5 6 4 10.5 Model MY1B16G MY1B20G MY1B25G MY1B32G MY1B40G "P" indicates cylinder supply ports.
108 49 14 30.7 14 108 54 14 33.2 14 110 64 14 36.5 15 121 77 14 41 16 136 92 17 46.2 16 139 100 17 53.2 23 165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.
105 7 185.5 175 155.1 15 115.5 8 198 187.5 165.6 16 126 9 210.5 200 176.1 17 136.5 10 210.5 200 186.6 12 147 11 223 212.5 197.1 13 157.5 12 235.5 225 207.6 14 168 13 248 237.5 218.1 15 178.5 14 260.5 250 228.6 16 189 15 273 262.5 239.1 17 199.5 16 273 262.5 249.6 11.5 210 L1 L2 L3 L4 L5 187 EX500 Decentralized Serial Wiring 10-SV Dimensions: Series 10-SV2000 for EX500 Decentralized Serial
14 20 20 13 14 15.5 16.5 19 19 16 16 16 16 16 16 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 Dimensions with mounting support is same as the basic style (Double acting single rod).
13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.
13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.