Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] JXC-C2-1 160 JXC-C2-3 300 JXC-C2-5 480 DIN rail L For 3 Axes For 4 Axes 5.25 12.5 (Pitch) JXC92 JXC73/83/93 7.5 AXT100 DR * For , enter a number from the No. line in the table below.

The G46, G46E, G46-L, G46-SRA/B, GZ46, GZ46E, and GP46 can be panel mounted. Dedicated attachments (cover ring assemblies) are required.
When ordering a pressure gauge with an attachment, indicate “-C” (irremovable clear cover with no protrusion) or “-C2” (removable clear cover with protrusion/with protruding wrench flats) in the part number.

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P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

XL

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

High Vacuum Angle Valve, XL Series

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

Size: 42.5 O.D., Display Pressure: 0.2MPa, 30psi, Connection Thread: R 1/8, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Wrench Tighten, Option: Both MPa and psi

Size: 46 (42.5 O.D.), Display Pressure: P10 (1.0MPa, 150psi), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X30 (Both MPa and psi)

Size: 46 (42.5 O.D.), Display Pressure: P4 (0.4MPa, 60psi), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X30 (Both MPa and psi)

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

Size: 46 (42.5 O.D.), Display Pressure: P2 (0.2MPa, 30psi), Connection Thread: 02 (R 1/4), Clear Cover Material: N (Nylon), Attachment: w/o Cover Ring Assembly/None, Option: X30 (Both MPa and psi)

Size: 46 (42.5 O.D.), Display Pressure: P2 (0.2MPa, 30psi), Connection Thread: 02 (R 1/4), Clear Cover Material: Polycarbonate, Attachment: w/o Cover Ring Assembly/None, Option: X30 (Both MPa and psi)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Type: -, Maximum Indicated Pressure(Mpa): -, Outer Diameter(φ): -, Shape: Back side thread, Maximum Indicated Pressure: 0.2 MPa / 30 psi, Connection screw: R 1/4, Transparent cover material: Polycarbonate, Special Configurations: Both MPa and psi, Attachment: Without cover ring assembly