0.55

2 x 4.2 (For mounting) Grommet (G) (H) 1/8, 1/4 DC without light/surge voltage suppressor [1(P) port] (18.4) (18.4) 1/8 (Distance between ports) [5(EA), 3(EB) port] 1.3 1P 3EB 15.8 5EA G: Approx. 300 H: Approx. 600 2 x 2.2 8 1.3 36 152.3 (PE port) 76.8 (Lead wire length) L-type plug connector (L): VF3230-;L;;1; 01 02 DIN terminal (D) (Y): VF3230-; ;;1; D Y 01 02 163.6 Max. 10 Applicable

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 (14.5) L Without light SY100-82-1 With light How to Order Enter the part number for a plug connector solenoid valve without connector together with the part number for a connector assembly with cover.

ZP

: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

Vacuum Pad

: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Vacuum Pad

: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

Vacuum Pad

: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

VFR

A, B, EA, EB port) Nil R External pilot Internal pilot 1 4 3 8 02 03 Plug-in VFR3000 P 02 Thread type Non plug-in VFS3000 S 02 Nil F G Rc N NPT NPTF T B Plug-in VFR3000 P 02 Non plug-in VFS3000 S 02 B Piping port (P, A, B, EA, EB port) Note) Mounting bolts and gaskets are not attached. 1 4 02 3-5-31 32 Series VFR3000 Construction 2 position single 2 position

VQZ1000/2000/3000

P 3 5 1 PE port 2-Rc 1/8 3(R2), 5(R1) port 22.2 die-cast hole (For manifold gasket positioning) Rc 1/4 1(P) port L plug connector (L): VQZ3120 1(R)-L-C6/C8/C10/02 DIN terminal (Y): VQZ3120 1(R)-Y-C6/C8/C10/02 300 108.5 (Lead wire length) 72 Indicator light 111.5 MAX. 10 30.5 <35.5> Applicable cable O.D.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Series SV

Note 1) Note 1) Note 1) Note 1) Double wiring specification Double wiring specification Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... 09 02 04 02 12 02 04 02 4 stations 2 stations 9 stations 2 stations 4 stations 2 stations 12 stations 2 stations Note 2) Note 2) Note 2) Note 2) Specified layout (Up to 18 solenoids

5 Port Solenoid Valve Series VQZ1000/2000/3000

models only) 2 x 3 die-cast hole (For manifold gasket positioning) 1/4 1(P) port VQZ3 2 (R)-G1-02 0 1 1 8 9 M-type plug connector (M): VQZ3 2 (R)-M1-C6, C8, C10 0 1 1 8 9 43.3 [50.3] Approx. 300 (Lead wire length) 95.2 [97.4] 1/4 [4(A), 2(B) port] 90.2 18 38.5 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC L-type plug connector (L): VQZ3 2 (R)-L1-C6, C8, C10

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2) Pressure gauge AWM30/40 AWD30/40 (with color zone) 0.02 to 0.2 MPa setting

Table of Contents

ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 1) Double wiring Note 1) Double wiring Note 1) Double wiring Note 1) 09 02 04 02 12 02 04 02 9 stations 2 stations 4 stations 2 stations 4 stations 2 stations 12 stations 2 stations Specified layout Note 2) Specified layout Note 2) Specified layout Note 2) Specified layout Note 2) (Up to 18 solenoids possible) (Up to 8 solenoids possible) (Up to 24 solenoids possible) (Up to 8 solenoids

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 122[126.4] 36[38.2] 2-4.3 (For mounting) B A 27 A B R1 R2 P Manual override 8.5 34 63.8 13.8 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor) 57.5[64.5] + 42.1 25.5 20 12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN Terminal (D): 10-SYJ7 43-D3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3

VFS

02 2 stations 6 For bottom ported, Rc 1/8 is only available.

/

Orifice symbol (diameter) Solenoid valve model (Port size) VXE21 0 1 2 3 VX021N-12A 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXE21 VXE22 VXE23 VXE22 0 2 3 4 VXE23 0 2 3 4 01 (1/8) 02 (1/4) 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) VX022N-12A Port symbol (Port size) VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Table (3) Rated Voltage Electrical Option Rated voltage Voltage L (With light) Voltage symbol

VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550