Title not found . 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.
CS1 series Without auto switch With auto switch H 120 120 130 145 145 175 190 Bore size (mm) F 50 50 50 55 55 69 69 ZZ 245 245 266.5 291 291 357.5 387.5 F 50 50 50 55 55 H 120 120 130 145 145 ZZ 245 245 266.5 295 300 125 140 160 180 200 250 300 F H ZZ + Stroke (mm) MB series Bore size H ZZ 32 47 135 40 58 146 50 67 165 63 67 165 80 81 199 100 81 199 ZZ + Stroke H (mm) MB1 series Bore
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.
/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 15-2-87 16 16 Series KKH Dimensions: Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Weight g A2 Model A1 T KKH3S-01MS R 1/8 33.5 20.4 20.4 6.0 36.0 14 40.0 37.5 D -02MS 19.6 R 1/4 1/8 31.5 19.5
N) Pitch moment Yaw moment Roll moment F F L1 A1 Mp A2 L2 W L3 A3 Graph (1) Load Weight: W Mr Static moment Dynamic moment MXY6 W My W L3 A3 0.6 A2 L2 Rubber stopper screw MX Load weight W kg Mr 0.5 L1 A1 Metal stopper screw Mp 0.4 W MTS My W 0.3 W MY 0.2 Mey Mep 0.1 We CY We 0.0 A2 L3 A3 L2 Collision speed V mm/s 0 100 200 300 400 500 280 560 MG Courtesy of Steven Engineering, Inc.-230 Ryan
L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.
How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !
F A F MX MTS Lr MY 16 16 16 Lr = 120 mm MXQ16-10 MXQ16-10 MXQ16-10 0.04 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-75 MXQ16-100 MXQ16-125 MXQ16-125 MXQ16-125 MXQ16-125 CY MXQ16-50 MXQ16-50 MXQ16-50 0.06 MXQ16-75 MXQ16-20 MXQ16-30 MXQ16-20 MXQ16-20 MXQ16-30 MXQ16-30 0.12 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ16-75 MXQ16-40 MXQ16-75 MXQ16-75
Applicable tubing O.D. d L2 L3 M1 L2 L3 M1 TMH ASD AS D2 D2 L1 L1 AS-FE KE L4 AS-FG L4 AS-FP H (Hexagon width across flats) H (Hexagon width across flats) AS-FM AS-FM D3 D3 AS-D L5 A1 L5 A1 A2 D1 D1 AS-T A2 ASP T ASN T AQ ASV Inch Size AK L4 L5 (1) A1 (2) A2 (2) M1 Max.
A1 D1 L5 D1 A2 T T Inch Size Weight (g) L4 (1) L5 (1) A1 (2) A2 (2) M1 d T H D1 D2 D3 L1 L2 L3 Model Max.
Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot
Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
Deflection on A when load is applied on F. Table deflection when yawing moment is applied. Deflection on A when load is applied on F. Table deflection when roll moment is applied. Deflection on A when load is applied on F.
Gripping point L (mm) MRHQ F F Misc.
Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"