Title not found

SMC believes their locnl presence is critical to c u s t on rc r -foa t; ed p n d u c t de re l opm c t t I prorcs.r. SMC's Global Engineering Netwirrk UTC (US Technical U. S. A.

ITV-E

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

Title not found

Free Free E Free Pitch dimensions (without magnet) (mm) Bore Size E 4 6 8 10 10 13 13 13.5 Free Easy seal replacement With front boss (h9) Seals can be replaced easily by removing rod cover. Centering can be done easily. Rod cover Tolerance h9 Clean room series Series 10-, 11-CUJ Two auto switches can be installed even for 4mm strokes.

ITV

Flat bracket 100 INI-398-0-6 L-bracket 15 25 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 n36 84 4-5.5 4-7 36 7 AC 36 7 70 20 60 AV 12 4-5.5 AU 1.6 Precautions AF AR Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.1.0-1 and 1.0-2 for more detailed precautions of every series.

O

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

O

I nput si gnal O ut put pressure of E/P regul at or O N O FF Sw i t ch out put 10 Key l ocki ng f unct i on CAU TI O N The keys are l ocked af t er t urni ng t he pow er on and can not be operat ed.

ARJ1020F

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Soft Start-up Valve AV2000/3000/4000/5000 1

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Proposals for Energy Saving

G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

Large Flow Air Filter AF800/900 Series

Symbol Air filter Air filter with auto drain How to Order AW -A -B 2 1 2 1 AW 12 AF 00 8 AG L L Option Air filter Flow Rate Characteristics (Representative Values) Nil E None Body size D 5 Drain cock with barb fitting Drain guide 8 9 1 2 1 2 AV AF800 J 6 R Flow direction: Right to left AF AF Pressure drop (MPa) Pressure drop (MPa) Auto-drain specifications Option 00 10 11 None Float type

IC

CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

Profi-E

U se a sof t cl ot h t o rem ove st ai ns. Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s docum ent descri bes t he general purpose product . Som e part s m ay di f f er f or part i cul ar speci al product s. Thi s m anual i s subj ect t o change w i t hout pri or not i ce. ITV2OM00076A 10

VER2000/4000

6 q w e r t y u i Block packing !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

Handle Note Body 1348102#1 ADC POM e Piston assembly Bonnet 1348104A r POM POM, NBR Valve 1348105 t Brass, NBR Valve spring 1348109 y Stainless steel 1348108 (For 0.85 MPa) Steel wire Adjusting spring u 1348108-1 (For 0.3 MPa) Dimensions Panel cutout dimensions 26 R2.5 SUP OUT SMC K C O P A A L U S H 12 37 54 25 1.6 (Max. thickness 4.5) 44 79.5 (When regulating pressure = 82) 5.4 10 31.5