Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: w/Electric Conductivity Control Function, Applicable to DI Water Piping

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: U+Y

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DM + U + Y

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: Inverter Pump Mounted

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: D+M+T1+U

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M+T1+U

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: M (Applicabe to DI Water Piping)

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option 1: Applicabe to DI Water Piping, Option 2: -

Cooling Capacity: 018 [1600/1800, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], Option 1: Applicabe to DI Water Piping, Option 2: -

1

COM. () 20 COM.

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

MLU

MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Table of Contents

Stroke ST (mm) 0 4 6 8 10 15 20 Caution Stroke ST (mm) When driving an inertial load, operate a cylinder with kinetic energy within the allowable value.

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Part no.

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

RQ

, 25 32, 40 50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

ZP

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Part No.