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Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

fitting) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size A, B port 2 to 10 stations: W = 26n + 207 11 to 20 stations: W = 26n + 229 2 to 10 stations: W = 52n + 245 11 to 16 stations: W = 52n + 279 Manifold base weight W (g) n: Stations Applicable flat ribbon cable connector Wiring specifications Flat ribbon cable connector,

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Stability of suction position,

0 r r r o e e e e u u y w u u w t u w t y y y y w t q w t q t q q q Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) Component Parts No.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

V100

Number No. r t y u i SS070A 01 1A O-ring FKM 10 SS070A-80A-1 VFN Port size Clip Stainless steel 10 SS070A-80A-2 With 3.18/2 barb fitting With 4/2.5 barb fitting 01 02 Metal joint Stainless steel SS070A-80A-3 10 Leaf spring Stainless steel 10 SS070A-80A-4 Mounting bracket Stainless steel 10 SS070A-80A-5 < U Side End Plate Assembly > w U side end plate assembly no.

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

F

P R O D U C T S E L E C T O R E X T E N D E D M A L E E L B O W : K Q W ( K Q 2 W ) Applicable Thread Model H D1 D2 L1 L2 A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon Urethane 3.2 M5x0.8 KQW23-M5 8 9.6 8 17.5 30 31 15.5 2.8 2.4 10 3.2 1/8 KQW23-01S 10 9.6 10 17.5 37 22.5 15.5 2.8 2.4 19 3.2 1/4 KQW23-02S 14 9.6 10 17.5 43 42 15.5 2.8 2.4 41 4 M5x0.8 KQW04-M5 8 10.4

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w e t o u q !

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

ZP3

Form w 1 Material 10 N S U F GN GS 2 10 10 11 2 C ZP3 B 13 13 14 3 16 16 17 A B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 10 to 16 w q ZP3 B T N 10 A5 M5 x 0.8 Width across flats 10 e Connection thread (Male thread) 10 3 A5 M5 x 0.8 Model Vacuum inlet

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X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

V

www.stevenengineering.com I 6.3 VACUUM VACUUM EJECTOR SERIES NZM H O W T O O R D E R NZM V A C U U M E J E C T O R D I M E N S I O N S W I T H VA LV E A N D VA C U U M S W I T C H W I T H V A LV E S A N D S W I T C H (N)ZM HK5LZ V O LTA G E 5 24VDC 6 12VDC N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm V A C U U M S W I T C H Nil Without E15L Solid State (NPN) E55L Solid

High Vacuum Angle Valve

w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

smcmaintenancepartslist

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30