REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

CG5-S

Style) 2-EE NPT KK R E A W M 4FB WF TF ZB + STROKE UF BORE A E EE FB KK M R TF UF W WF ZB 40 (1.50") 0.75 2.00 1/8 0.31 7/16-20 0.16 1.43 2.75 3.38 0.63 1.00 4.62 50 (2.00") 0.75 2.50 1/4 0.37 7/16-20 0.22 1.84 3.38 4.13 0.63 1.00 5.26* 63 (2.50") 0.75 3.00 1/4 0.37 7/16-20 0.28 2.19 3.88 4.63 0.63 1.00 5.25 80 (3.25") 1.13 3.75 3/8 0.44 3/4-16 0.28 2.76 4.68 5.50 0.75 1.38 6.51* 100 (4.00

CY1

, 25 CY1H15, 20, 25 L LL CY1H -B PA 4-M thread depth MM 15 20 25 Guide central axis ZZ XA XB PB Piping port surface S + Stroke LW EB EA 2-P HC HP H HB HA HG HT NT Square nut for body mounting J 8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x

HRX-OM-X071

Model number: HRR050-AN/WN-20/40The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR050-AF/WF-20/40The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-R026

Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5

HRX-OM-T002

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. #40 7 Filter Rc1/2 20m 8 Valve Rc3/8 Y-strainer Rc3/8 Install either the strainer or filter.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

Magnetically Coupled Rodless Cylinder

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

7 t CY3R15, 20 CY3R15 Parts list No. Description No.

CG5-X6011

Style) 2-EE NPT KK R E A W M 4FB WF TF ZB + STROKE UF BORE A E EE FB KK M R TF UF W WF ZB 40 (1.50") 0.75 2.00 1/8 0.31 7/16-20 0.16 1.43 2.75 3.38 0.63 1.00 4.62 50 (2.00") 0.75 2.50 1/4 0.37 7/16-20 0.22 1.84 3.38 4.13 0.63 1.00 5.26* 63 (2.50") 0.75 3.00 1/4 0.37 7/16-20 0.28 2.19 3.88 4.63 0.63 1.00 5.25 80 (3.25") 1.13 3.75 3/8 0.44 3/4-16 0.28 2.76 4.68 5.50 0.75 1.38 6.51* 100 (4.00

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 060 (Cooling Capacity: 4900/5900, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 4700/5100W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 2600/3200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]