M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5
8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 11-9-20 21 Rotary Table Series MSQ Dimensions: Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type: MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA counterbore depth JB 22.5 CRB2 BE CRBU2 CRB1 WF 2-M5 x 0.8 Piping port (Plugged)
Cooling Capacity: 030 (Cooling Capacity: 2600/3200W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: MT (M + T)
5 6 27.8 29 32 37.5 27 34 37 50 28.5 30.5 33.5 37.5 20H9 28H9 32H9 35H9 35h9 40h9 48h9 54h9 17 19 24 28 20 22 22 24 6.8 8.6 8.6 10.5 11 14 14 18 6.5 8.5 8.5 10.5 12 14 14 19 34.5 46 50 63 60 76 84 100 4.5 6 6.5 10 46h9 61h9 67h9 77h9 4 6 4.5 5 20 27.5 29 38 9.5 12 12 15.5 45h9 60h9 65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q
, VALVE, SY7000 SOL/VALVE, RUBBER SEAL, WF, SY7000 BUILT IN FITTING >1/4, .35494 lb
screw tap NT-UNC Data (in) Bore size (in) MM KK NT XA NH YE WF TN NE EA EE DD A AA B CA D E NA 075 (3/4") 10-32 UNF 0.625 0.75 1.12 0.38 0.88 0.34 0.62 0.81 0.12 1.00 1/8 1.00 0.093 0.22 1/4-28 10-32 UNF 1/4-20 0.250 106 (1 1/16") 10-32 UNF 0.750 0.75 1.47 0.62 1.22 0.47 0.81 0.24 1.12 1.25 1/8 1.25 0.093 0.25 3/16-24 10-32 UNF 1/4-20 0.312 150 (1 1/2") 1/4-20 NUC 1.00 1.25 1.93 0.88 1.57
Description 10 20 30 50 DSeal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.
0.01 0.01 0.02 5 10 15 20 0 Moment ( Nm) 5 10 15 20 0 Moment ( Nm) 25 25 25 5 10 15 20 0 Moment ( Nm) CY1HT25, 32 CY1HT25, 32 CY1HT25, 32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 Deflection (mm) Deflection (mm) 0.03 0.04 0.02 0.03 CY1HT32 0.02 0.02 0.01 0.01 0.01 20 40 0 60 80 20 40 0 60 20 40 0 60 Moment ( Nm) Moment ( Nm) Moment ( Nm) Intermediate Stops Vertical operation 1) Intermediate
25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.
7 t CY3R15, 20 CY3R15 Parts list No. Description No.
7 t CY3R15, 20 CY3R15 Parts list No. Description No.
10 1.2 12 76 34 8.1 10 50.4 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 8 34.7 70 17 18.5 10 1.2 12 84 37 10.5 10.5 53.5 65h9 67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 10 39.7 80 19 21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4
, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024
1.3 kW, 1.7 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 100 VAC, 50/60Hz or 115 VAC, 60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024
, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024
1.3 kW, 1.7 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 100 VAC, 50/60Hz or 115 VAC, 60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024
Prepare an earth leakage breaker with a capacity of 10 A as listed in the HRS024 catalog. Set the current sensitivity of the earth leakage breaker to 30 mA.
grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Condenser Bracket for HRS024
with the grill of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Comm D-Sub for HRS024
/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250