Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

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ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

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ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.

Direct Solenoid

o.s, ercept dyo6.. op.Btins PEssubs: 28" vacuum 0 PStc {20 Kgt/cnf)' NVS/tl|-4 Prssure Fanoe: 28" vacul 3@ rlc {20 Kgrcnti) Lakage: Irort lo pon (nt.maD not to .xce.d 0.005 coblc fl pr hinut at 1@ PstG (6.7 toam) Mel4islr: all houshc !6n. atumhum d|6 cas|ngg $oor arld stc@ a40F 61atnt6r. p.5rlvated ad hdtJoai.d lo 5a52 FE*wdl c 96* orlnot Blra N, sp&.r end dl.nl hou3in!

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: M + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M + T

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: M + T

Type: -, Cooling Method: -, Cooling Capacity: 2,100/2,400 W (50/60 Hz), Piping thread type: Rc, Optional specifications: Compatible with deionized water (pure water) piping / High pump head specification

Type: -, Cooling Method: -, Cooling Capacity: 2,100/2,400 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping / High pump head specification

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: MT (M + T)

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: MT (M + T)

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: MT (M + T)

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: MT (M + T)

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: MT (M + T)

, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024

1.3 kW, 1.7 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 100 VAC, 50/60Hz or 115 VAC, 60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024

, 4.2 kW, 5.1 kW, 5.9 kW (at 60Hz); Temperature range setting: 5 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: single phase 200 to 230 VAC, 50/60Hz; Standards: CE, UL, RoHS; Circulating fluid: Tap water or 15% ethylene glycol, 30% Dowcal™100, ControXic 1642, Hexid A4, Coolflow IGE, NALCO®CCL105; SMC recommends Bypass Piping Set HRS-BP001 for Models HRS-012, HRS018, HRS024