Cooling Capacity: 30 kW, Type: Fluorinated Fluid, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: C+N

Table of Contents

ZR1--CN . 1 pc.

LEC-OM02704CN

AC200230VL1L2L3 AC100120VL31.2 3. 2131 1 3 1 1.1.3 CC-Link142 0.001[mm] 0.01[mm] 0.1[mm] 1[mm] 9 0 [r/min] 020 [ms] 020 [ms] DWELL 020 [ms] 03 (4.2) 1312255 (1) CC-Link (a) CC-Link (b) CC-Link 1 2 CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2 CN2 1 4 1 (2) CC-Link (a) PD06PD08PD12PD14CN6 CC-Link CC-LinkCN6 (b) CC-Link CC-Link ( 1 ) ( 2 ) CN 1 CN 1 CN6 CN6 CN P 3 CN P 3 CN2

Vacuum System Peripherals:

Switch lead wire length ZSE1 Switch lead wire length Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Lead wire length 0.6 m C Electronic: ZSE1 Connector type Lead wire length 3 m Without connector CL CN ZSM1 Nil Lead wire length 0.6 m L Grommet type Lead wire length 3 m Diaphragm: ZSM1 The following columns shall be filled in by SMC.

ZX

Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Combination of supply valve and release valve Unit for replacement Pilot valve Voltage Manual operation Refer to page 13-2-54 for details.

IDX-OM-W035

CN MC V V CN CN PRS PRS IDFB37E IDFB55E/75E-46 CM GFCI R FM FM16 MC THR MC1 MC1 MC2 CM PE PRS MC2 PRS1 FM PE PRS2 PRR PRR ILS C01 THR W1 TB T TB1 W2 TB2 MC1 PRR C01 CM C1 MC2 PRS1 GFCI P PRS2 THR OLR P EDV PC EDV PE T V IDFB Series 6-4 6-3 IDX-OM-W035 6 6-5 (IDFB55E,75E) (IDFB22E,37E) ,, IDFB Series 6-5 6-4 IDX-OM-W035 7 K 7 K 7-1 ( ) 7-2 240psi (1.6MPa

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

CATALOG

32 4.05 20 O 0.55 1.30 1/8 NPT 1.47 40 3.41 12.01~45 40 4.37 20 O 0.59 1.60 1/4 NPT 1.82 50 4.00 12.01~55 50 5.27 20 O 0.59 1.87 1/4 NPT 1.82 63 4.00 12.01~55 63 5.27 Note: Long Stroke design is a three piece construction: Rod Cover, Head Cover and Tube Body D I M E N S I O N S S I N G L E C L E V I S T Y P E NC(D)GCN_-_ A N D NC(D)GCA_-_ BORE S I N G L E C L E V I S ( I N C H) CE CH CM CN

Table of Contents

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Dedicated Controller

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

IDX-OM-W093

GFCI EDV PE TDR BK WH GR SY BU IDF80/90-20-T BR B A A B YE AC 200/200,220V 50/60Hz OR G/Y / IDF60/70/80/90 Series 12-4 IDX-OM-W093 T IDF60/70-30-T SIGNAL CM OLR FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF80/90-30-T SIGNAL CM FM MC MC2 PRS PRS2 ILS THR C11 TB CN GFCI EDV PE TDR APR IDF60/70/80/90 Series 12-5 IDX-OM-W093

ZR

ZR1--CN . 1 pc.

A

32 4.05 20 O 0.55 1.30 1/8 NPT 1.47 40 3.41 12.01~45 40 4.37 20 O 0.59 1.60 1/4 NPT 1.82 50 4.00 12.01~55 50 5.27 20 O 0.59 1.87 1/4 NPT 1.82 63 4.00 12.01~55 63 5.27 Note: Long Stroke design is a three piece construction: Rod Cover, Head Cover and Tube Body D I M E N S I O N S S I N G L E C L E V I S T Y P E NC(D)GCN_-_ A N D NC(D)GCA_-_ BORE S I N G L E C L E V I S ( I N C H) CE CH CM CN

Electric Actuators

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.

Ozone Resistant

Molecular structure Basic molecular structures Rubber type Basic molecular structure (-CH2-CH=CH-CH2-)x (-CH2-CH-)y I CN NBR (acrylonitrile-butadiene rubber) (-CH2-CH2-CH2-CH2-)x (-CH2-CH-)y I CN HNBR (hydrogenated nitrile butadiene rubber) Double bond Deterioration caused by ozone occurs when ozone acts on the NBR double bond to break the rubber molecules apart.

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.