Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NY (N+Y)

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NY (N+Y)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NY (N+Y)

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

1

Applicable bore size B2 C2 d H2 CK1 SNJ-006B 6 8 9.2 M6 x 1.0 4 NTJ-006A 6 5.5 6.4 M3 x 0.5 2.4 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Part no.

44

10 14 15.8 18.7 5.8 6.6 KK130 H2 H2 M L 15 17 22.2 7.6 DM d 16 17 24.3 8.5 KDM 21 22 28 9.3 KB Swivel Elbow: KFG2V KR Applicable tubing size (mm) O.D.

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Air Cylinder

manual release: Suffix L With rod boot 8 8 l Width across flats B3 e JH JW f h ZZ + Stroke (mm) Bore size (mm) Stroke range A AL B1 B2 D DL E F FL G H H1 H2 HR HN Symbol (Max.)

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

SMC Pneumatic Clean Series

M26 x 1.5 M20 x 1.5 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 M26 x 1.5 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 17 Air cylinder CM2 2122CM2/ 101110112122Axial foot style (L) / CM2L, CM2L With rubber bumper Standard port H A K F G Relief port 2-P AL H2 G F 2-NN B (Rc, NPT, G) Width across flats B1 H1 LH Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

Table of Contents

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

Proposals for Energy Saving

D M L2 L1 (mm) H1 Width across flats Minimum bore H2 Width across flats Effective area mm L2 When connected Model Applicable hose I.D.