VFR

1 u q t q e i e !1 i u !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o r o r y PE 5(EA) 4(A) 1(P) 2(B) 3(EB) Bleed PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE w 5 1 3 3 position closed center/exhaust center/pressure center Closed center: VFR630 !1 i q !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Aluminum die-casted Resin (1) 1 4 3 8 Platinum silver Black (3) Aluminum die-casted Sub-plate i DXT156 24 1 2 3 P DXT156-24-3P 1 2 Resin (1) Black Pilot valve assembly Resin Resin Resin (2) Refer to How to Order on page 3-4-34.

MQQ

2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

Model: H (Male Connector), Tube Size: 10 (Ø10), Connection Thread: G02 (1/4G)

G02.

.: 1209 (Ø12 x Ø9), Port Size/Applicable Tube: G02 (G1/4 Thread)

G02.

G02.

.: 0806 (Ø8 x Ø6), Port Size/Applicable Tube: G02 (G1/4 Thread)

Wide variations of mountings are available.3 position cylinder w/intermediate stopper mechanism, 2-stage stroke enabled with a small increase in length, Repeatability in intermediate stop positioning: ¹0.02 or less, First-stage stroke can be freely specified, Wide variations in mounting, Cylinder, 3-Position, 3-POSITION CYLINDER, G02, 1.67000 lb

Wide variations of mountings are available.3 position cylinder w/intermediate stopper mechanism, 2-stage stroke enabled with a small increase in length, Repeatability in intermediate stop positioning: ¹0.02 or less, First-stage stroke can be freely specified, Wide variations in mounting, Cylinder, 3-Position, 3-POSITION CYLINDER, G02, 1.82000 lb

Wide variations of mountings are available.3 position cylinder w/intermediate stopper mechanism, 2-stage stroke enabled with a small increase in length, Repeatability in intermediate stop positioning: ¹0.02 or less, First-stage stroke can be freely specified, Wide variations in mounting, Cylinder, 3-Position, 3-POSITION CYLINDER, G02, 1.86000 lb

Wide variations of mountings are available.3 position cylinder w/intermediate stopper mechanism, 2-stage stroke enabled with a small increase in length, Repeatability in intermediate stop positioning: ¹0.02 or less, First-stage stroke can be freely specified, Wide variations in mounting, Cylinder, 3-Position, 3-POSITION CYLINDER, G02, 4.34000 lb

Wide variations of mountings are available.3 position cylinder w/intermediate stopper mechanism, 2-stage stroke enabled with a small increase in length, Repeatability in intermediate stop positioning: ¹0.02 or less, First-stage stroke can be freely specified, Wide variations in mounting, Cylinder, 3-Position, 3-POSITION CYLINDER, G02, 1.90000 lb

KK/KK13

ANR]) 2,500 2,000 Connected plug and socket 1,500 KK13S-02M + KK13P-02M 1,000 500 0 0.2 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 Primary pressure (MPa) 11 S Couplers How to Order KK 13 S 02 M Series 13 Connection type M F B Male thread Female thread With barb fitting Port size variation Socket/Plug designation Male/Female thread type Barb fitting type S P Symbol 07 09 11 13 Symbol 01 02 03 04 G02

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Indicator light 3.5 to 7 < >: AC 82.5 75 M plug connector (M): VQZ25(R)-M01 02 56.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 77.5 58 <63> 300 89 Indicator light < >: AC 4-14-31 Base Mounted 32 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ35(R)-G02 03 37 5 2-4.5 mounting hole 23.5 5 R5 Cover dia. 1.6 Manual override Cross section 0.34 mm2 2 A 45

G02.