Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

A

-06 3/4 75 172.5 20 70 14 50 54 25 8.5 10.5 70 2.3 73 198 Float type Courtesy of Steven Engineering, Inc. !

F

22 57.4 5/16 3/8 KQU09-U02 17.46 15.2 51.5 15.2 45.5 18.5 6 12 38 KQU12-U03 22 20.9 61 20.9 55 22 57.4 3/8 1/4 KQU11-U02 19.05 17.9 56.5 17.9 50.5 21 7 12 12 KQU12-U04 22 20.9 62.5 20.9 54.5 22 57.4 3/8 3/8 KQU11-U03 19.05 17.9 56.5 17.9 50.5 21 7 3/8 1/2 KQU11-U04 22.23 17.9 59 17.9 51 21 7 1/2 1/4 KQU13-U02 22.23 21.7 61 21.7 55 22 9.6 1/2 3/8 KQU13-U03 22.23 21.7 61 21.7 55 22 9.6 1/2

Fluoropolymer Piping Equipment

3/8" 3/4" 1/2" 20 29 24 17 26 21 44 54 49 23 39 28 5.8 LQ1T5A-R32 1/4" 3/4" 1/4" 39.5 20 36 17 46.5 55 46.5 49 23 3.6 LQ1T6A-R2 1" 1/2" 1" 8 39.5 24 20 20 29 14 28 TD TID 7 TH TIH 9 LQ1T6A-R3 1" 3/8" 1" 5.8 LQ1T6A-R4 1" 1/4" 1" 20 17 55 47.5 55 23 3.6 LQ1T6A-R5 3/4" 1" 1" 8 39.5 18 36 36 69.5 69.5 69.5 49 15 LQ1T6A-R6 1/2" 1" 1" 24 21 54.5 28 9 LQ1T6A-R7 3/4" 3/4" 1" 39.5 36 69.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

LS + Stroke ZZ + Stroke CJ1 82.5 45 5 22 13 82 106 101 55 5 28.5 14 100 125 121 65 7 30 16 120 150 CJP Other dimensions are the same as basic style.

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB/CA1 Tube x Length T0604 x 1 m VQZ1121-C6 Speed controller AS2051F-06 Silencer AN120-M5 Tube x Length T0604 x 1 m VQZ2121-C6 Speed controller AS3001F-06 Silencer INA-25-46 Tube x Length T1075 x 1 m VQZ3121-C6 Speed controller AS4001F-10 Silencer AN101-01 2-7-2 3 Series VQZ Model

VFS

03 04 06 q Description No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-55-1B(-Q) SY5000-55-1B(-Q) SY7000-55-1B(-Q) Applicable series Applicable series 10-SY3000 10-SY3000 10-SY5000 10-SY5000 10-SY7000 10-SY7000 One-touch fitting (Inch size) One-touch fitting (Inch size) Port size 5/16" One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting Assembly part no.

ZP

3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06 04 06 04 06 04 06 Model 04 06 04 06 04 06 04 06 ZP2-T4020WK ZP2-T5020WK ZP2-T6020WK ZP2-T8020WK ZP2-T3507WK ZP2-T4010WK ZP2-T5010WK ZP2-T6010WK 2 x 1.5 0.5 0.5 10 11 2.5 0.8 04 06 ZP2-T 30 WK H Width across flat J (Hexagon) (G) (F) Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 14 (Hexagon) E 13 3 3 M10 x 1 D M5 x 0.8 6 8 Y A a

CL

GL 6 9 9 11 B2 26 32 32 41 GA GR 4 7 7 7 H1 5 6 6 8 20 25 32 40 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 63.5 73.5 to 400 to 450 to 450 to 500 CXS 64.5 74.5 83.5 64.5 70 74.5 80 83.5 CXT 100.5 90.5 (mm) MX Bore 20 25 32 40 K 5 5.5 5.5 7 LC 4 4 4 4 LD 6.8 6.8 6.8 7 NA 24 30 NN P 1/8 1/8 1/8 1/4 LS 167 177 179 213 LH 25 28 28 30 LX 40 40 40 55 LT 3.2 3.2 3.2 3.2 LZ 55 55 55 75 N 15 15 15 PH 19.5 24

VFR

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

5

(n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 60 70 85 110 115 120 n (Same surface) 60 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 70 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 55 (n

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

Modular Type Filter Regulator Series AW

80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting B With drain guide B Metal bowl B 107 160 214 251 255 Metal bowl with level gauge Model B AW10

SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

VM

VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust center) Rc 3/8: 49 Rc 1/2: 55 VH402-02 to 06 VH412-02 to 06 2 (Position) 1/4 to 3/4 2 1 1.28 VH4 Handle Operation Angle and Air Flow Direction VH420-02 to 06 VH430-02 to 06 3 (Closed center) (Refer to the figures of piping direction to the right.)

Vacuum System Peripherals:

ZZX1 06 Manifold base Supply port location Stations Thread of supply and exhaust valve Right side Left side Both sides R L B 01 1 ZX Note) Exhaust port is both sides release type. ... ...

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) 100 120 125 130 15 25 105 140 30 D-F5NT 100 + 55 (n 4)/2 n = 4, 8, 12, 16 120 + 55 (n 4)/2 n = 4, 8, 12, 16 125 + 55 (n 4)/2 n = 4, 8, 12, 16 130 + 55 (n 4)/2 n = 4, 8, 12, 16 15 + 55 (n 2)/2 n = 2, 4, 6, 8 25 + 55 (n 2)/2 n = 2, 4, 6, 8 105 + 55 (n 4)/2 n = 4, 8, 12, 16 140 + 55 (n 4)/2 n = 4, 8, 12, 16 30 + 55 (n 2)/2 n = 2, 4, 6, 8 With n pcs

CV/MVGQ

(n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 90 100 110 120 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 D-A59W n (