5 Port Solenoid Valve Series SY3000/5000/7000/9000

In ordering, specify the part nos. in the order from the 1st. station on D side.

smcmaintenancepartslist

Make measurement on dimensions A as shown in Fig. 5 (b) and adjust it in such a way that Dimensions A are equal to those B, resulting in being at such a condition as shown in (e) of Fig. 5. As can be seen in Fig. 5 (a) and (b), the lock nut should be set to the bottom in the installation employing the joint. In the installation not employing the joint, set it to the top.

VFS

(Lever) (Option) Non plug-in 110 to 120 VAC, 50/60 Hz 12 11 Plug-in type Non plug-in type DIN terminal (D) Grommet terminal (E) 220 VAC, 50/60 Hz 240 VAC, 50/60 Hz 12 VDC 100 VDC 3 position double check VFS5000 20 17 Plug-in type Non plug-in type Plug-in Conduit terminal (F) 2 position single VFS6000 Non plug-in Non-locking push type (Flush) 38 Plug-in type Non plug-in type Grommet terminal

Table of Contents

IN/OUT piping position A B C Top IN side OUT side Front Top Bottom Symbol Bottom Top Bottom Top Front Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 3 4 Bottom IN/OUT: Bottom IN/OUT: Top IN: Bottom OUT: Top IN: Top OUT: Bottom IN IN OUT OUT 3.

Hydraulic

OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 804 550 1256 862 1963 1347 3116 2126 5024 3434 7850 5388 1256 1002 1963 1569 3116 2500 5024 4035 7850 6260 32 18 40 22.4 B-series rod 50 28 63 35.5 80 45 100 56 40 18 50 22.4 C-series rod 63 28 80 35.5 100 45 Minimum Strokes for Auto Switch Mounting Unit: mm Mounting brackets other than center trunnion Center trunnion

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

to Order Specifications (For details, refer to page 7-10-1.) 0.7 0.7 0.5 0.5 0.3 IN 59 422 42 302 25 181 IN 12 32 OUT 79 563 57 402 34 241 OUT Symbol Specifications IN 106 739 75 528 45 317 IN -XA 16 40 Change of rod end shape OUT 141 880 101 628 60 377 OUT -XB10 Intermediate stroke (Using exclusive body) IN 165 1150 118 825 71 495 IN 20 50 -XC8 Adjustable stroke cylinder/Adjustable extension

Smooth Cylinder/Low Speed Cylinder

Operating pressure (MPa) Bore size (mm) Contents Kit no. 0.3 0.5 0.7 IN 181 302 422 32 40 50 63 80 100 CQ2Y32-PS 32 OUT 241 402 563 Piston seal 1 pc.

CL

Fine Lock Cylinders Lock-up Cylinder Series CL 16, 20, 25, 32, 40, 50 63, 80, 100, 125, 140, 160 Locking in both directions is possible. Locking in either side of cylinder stroke is possible, too. (The lock-up cylinder can be locked only in one direction.)

JIS Standard Hydraulic Cylinder

OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 804 550 1256 862 1963 1347 3116 2126 5024 3434 7850 5388 1256 1002 1963 1569 3116 2500 5024 4035 7850 6260 32 18 CHQ 40 22.4 CHK B-series rod C-series rod 50 28 CHN 63 35.5 CHM 80 45 CHS 100 56 CH2 CH2 40 18 CHA 50 22.4 Related Products 63 28 D80 35.5 100 45 Water Resistant Hydraulic Cylinder R CHD2F F5BAL Mounting Bore

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

meter-in and meterout speed controllers, smooth start-up and soft stop may not be achieved.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

The stroke can be set in 1 mm increments.

MGC

stroke cylinder/Adjustable extension type OUT 491 98.2 147 196 246 295 344 393 442 491 25 10 -XC9 Adjustable stroke cylinder/Adjustable retraction type IN 412 82.4 124 165 206 247 288 330 371 412 -XC11 Dual stroke cylinder/Single rod type OUT 804 161 241 322 402 482 563 643 724 804 -XC13 Auto switch rail mounting 32 12 IN 691 138 207 276 346 415 484 553 622 691 -XC18 NPT finish piping port

MGC

(mm) Operation direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGF OUT 62.8 94.2 126 157 188 220 251 283 314 314 20 8 IN 52.8 79.2 106 132 158 185 211 238 264 264 CY1 OUT 98.2 147 196 246 295 344 393 442 491 491 25 10 MY1 IN 82.4 124 165 206 247 288 330 371 412 412 OUT 161 241 322 402 482 563 643 724 804 804 32 12 IN 138 207 276 346 415 484 553 622 691 691 OUT 252 378 504

Table of Contents

in the figure below.

ZP

(If the devices are connected in series in the vacuum line, their conductances must be combined.)

ZP

(If the devices are connected in series in the vacuum line, their conductances must be combined.)

REA/REB

, magnets for switches are built in.

Free Mount Cylinder

86.0 51.6 172 IN -XB9 Low speed (10 to 50 mm/s) 220 157 94.2 314 OUT -XB13 Low speed (5 to 50 mm/s) 20 8 185 132 79.2 264 IN -XC19 Intermediate stroke (with a spacer built-in) 344 246 147 491 OUT -XC22 Seals made of fluorine rubber 25 10 288 206 124 412 IN Refer to Pneumatic Clean Series catalog for clean room specifications. 563 402 241 804 OUT 32 12 454 346 207 691 IN Tightening Torque

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Power saving circuit is only available in the "Z" type. Power saving circuit is not available in the case of "W" type.

MGG

442 491 491 OUT 25 10 82.4 124 165 206 247 288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180