3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

MY1

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

A Black zinc chromated MY-16B-Stroke B Nickel plated MY-16BW-Stroke 8-12-17 18 Series MY1W Dimensions: 16, 20 L (LL) 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW PG Q+ Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) W CH LH Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

A Black zinc chromated MY-16B-Stroke B Nickel plated MY-16BW-Stroke 8-12-17 18 Series MY1W Dimensions: 16, 20 L (LL) 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW PG Q+ Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) W CH LH RR SS NE H RR SS QQ NH NC M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) 2 x 2-M5 x 0.8 PP TT UU This port

SX

Port size M5 x 0.8 SX3000 SX5000 1 8 M5 x 0.8 SX3000 SX5000 1 8 Plug Inserted into an unused cylinder port and SUP/EXH ports. Purchasing order is available in units of 10 pieces. Connector width (W) SX3000-39-3A SX5000-39-17A SX3000-38-3A SX5000-38-17A For other commercial connectors, use a type with strain relief that conform to MIL-C-83503.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

SZ3000

sectional area mm (Cv value) PA/B 3.7(0.21) C6 A/BR 3.9(0.22) PA/B 3.4(0.19) M5 A/BR 3.2(0.18) Flat cable connector Socket: 26 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 20 pin MIL type with strain relief Complies with MIL-C-83503 Flat cable connector Socket: 10 pin MIL type with strain relief Complies with MIL-C-83503 D-sub connector Complies

MY2

32.4 NE 27 35.5 56.5 B 9.5 14 17.5 C 5.4 8.6 10.8 G 8.5 10.7 15.5 LB 87.4 124.7 148.3 (LL) 40 49.6 75 A 80 105 165 LD 5.5 9 11 LE 5 6 8 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PG 10 12.5 20 PH 10.2 13 18.5 PI 41 57.6 72 PB 80 110 132 PC 4 9.4 8.5 PD 23 29.2 36 PA 44 63 113 PE 1 3.4 0.5 RW 69 100 116 SS 9.7 14 21.5 TT 12.5 19.3 35.4 QW 66 98 110 R 5 8 12 RR 5.3 8.5

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

x 1.25 M10 x 1.5 GB 17 19.5 31.5 H 28 37 58 L 80 110.8 180 LA 70 100 158 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 G 8.5 10.7 15.5 LW 120 176 229 M 9 12 16 N 20 25 40 NC 14 21.3 32.4 A 80 105 165 B 9.5 14 17.5 C 5.4 8.6 10.8 LB 87.4 124.7 148.3 LE 5 6 8 (LL) 40 49.6 75 LD 5.5 9 11 Model MY2HT16G MY2HT25G MY2HT40G P M5 x 0.8 1/8 1/4 PF 10 12 20 PC 4 9.4 8.5 PD 23 29.2 36 PG 10 12.5 20 PH 10.2

2

V C Note 4) N.C.

Hydraulic Cylinders

H B (mm) C d D H B Part no.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B port size: M5, C4, C6, N3, N7.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

Electric Actuators

to Cross section C-C.

Table of Contents

to Cross section C-C.

1

(C) (C) (C) (C) (C) (C) CA2 6 Cushion valve CA2Q Double acting, Single rod Low friction type NCM CBA1 Double acting, Single rod Cylinder with end lock 1.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With