k=ise20" target="_blank">here.

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T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

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(B) (A) L P C D M Purge air for dew point indicator Q H J F K 37 N IN OUT (G) (E) (Maintenance space 100 mm or more) M5 Female thread Drain IDG30AM2, 50AM2 IDG30HAM2, 50HAM2 IDG30LAM2, 50LAM2 P (A) (B) D C P Purge air for dew point indicator L Q H Drain Discharge M J 37 F (R) N N.O.: Black N.C.: Gray IN OUT OUT Applicable tubing O.D.: 10 (NPT thread: 3/8") K (E) Float type auto-drain (G)

CATALOG

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

ZP

Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 119 137.5 141 6 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke

ZP

K Applicable tubing O.D. K Hexagon width across flats 12 Hexagon width across flats 12 ZU ZL ZY ZQ ZF ZP ZCU AMJ Bellows Bellows A D E F N P A E F N P B B Y Y C C D Misc.

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Table of Contents

M5 female x M5 female x M5 female M-3AU-3 For nylon tubing M-5T For polyurethane tubing 3.18/2 x M3 6/4 x M5 M-5AN-6 P. 57 P. 58 For soft nylon and polyurethane tubing 4/2.5 x M3 M-3AU-4 Universal elbow M-5UL For soft nylon tubing 3.18/2.18 x M5 Barb fitting for soft tubing M-5AU-3 Body rotates at 360 around the stud axis P. 56 M5 female x M5 male K Barb elbow for soft tubing For soft nylon

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Table of Contents

27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 39 MVGQ J x E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32 M8 x 1.25 x 10 13 76 7 7 M6 x 1 8.5 Rc 1/8 54 26 33 28 50 27

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-Y2A(J/K)3-B5 ZP3B-Y2A(J/K)6-B5 ZP3B-Y2A(J/K)10-B5 ZP3B-Y2A(JB/K)15-B5 ZP3B-Y2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

Table of Contents

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

Table of Contents

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C

Table of Contents

ZL D G: M4 x 0.7 G: M5 x 0.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 ZY A B Y Model C D E K A B K L Y Model C L F F F D ZPY20B ZPY25B ZPY06B ZPY08B 25 28 18.9 37 14 10.5 10.5 20 25 22 27 23.5 24 33.5 34 51.5 52 12.4 15.6 6 8 7 9 3.3 4.7 9.1 10.1 2.5 4 5 4 ZQ 5 6 8 32 34 29 39 57 ZPY32B Applicable Tubing Applicable Tubing ZF Q R Applicable tube P Q R Applicable tube P N4 (Nylon tube, 4/2.5) N6

Table of Contents

9 9 10 11 12 Model MHSHJ3-32D MHSHJ3-40D MHSHJ3-50D MHSHJ3-63D MHSHJ3-80D 0 0.036 0 0.036 0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 8H9 8H9 10H9 12h9 14h9 VA WA 4H9 4H9 5H9 6H9 6H9 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 SB 8 8 9.5 11 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 TA M4 x 0.7 M4 x 0.7 M5 x 0.8

CRB2/CRBU2/CRB1

(Example) For M3: L2 = 6mm Applicable shaft types: K, T L2 + (3 x P) L2 = (mm) (mm) K axis T axis Q1 Q2 Q1 = M L1 = L1 + (3 x P) Shaft type Shaft type J K T K T Size Size 50 50 M3, M4, M5, M6 M3, M4, M5, M6 L2 + (3 x P) L2 = 63 63 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6, M8 100 100 M5, M6, M8, M10 M5, M6, M8, M10 Symbol: A35 Symbol: A36 Machine female threads

Table of Contents

size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60

KJ

M5 female x M5 female x M5 female M-3AU-3 For nylon tubing M-5T For polyurethane tubing 3.18/2 x M3 6/4 x M5 M-5AN-6 P. 57 P. 58 For soft nylon and polyurethane tubing 4/2.5 x M3 M-3AU-4 Universal elbow M-5UL For soft nylon tubing 3.18/2.18 x M5 Barb fitting for soft tubing M-5AU-3 Body rotates at 360 around the stud axis P. 56 M5 female x M5 male K Barb elbow for soft tubing For soft nylon

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L2 = 6 mm Applicable shaft types: K, T L2 + (3 x P) L2 = (mm) (mm) K axis T axis Q2 Q1 Q1 = M L1 = L1 + (3 x P) Shaft type Shaft type K T J K T Size Size 50 50 M3, M4, M5, M6 M3, M4, M5, M6 L2 + (3 x P) L2 = 63 63 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6, M8 100 100 M5, M6, M8, M10 M5, M6, M8, M10 Symbol: A35 Machine female threads into the long

Table of Contents

(Example) For M3: L2 = 6 mm Applicable shaft types: K, T L2 + (3 x P) L2 = (mm) (mm) K axis T axis Q2 Q1 Q1 = M L1 = L1 + (3 x P) Shaft type Shaft type K T J K T Size Size 50 50 M3, M4, M5, M6 M3, M4, M5, M6 L2 + (3 x P) L2 = 63 63 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6, M8 100 100 M5, M6, M8, M10 M5, M6, M8, M10 Symbol: A35 Machine female threads into the long