Table of Contents

AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory AC20C to 40C AF + AFM + AR + [V] AC20D to 40D AW + AFM + [V] Description Symbol Applicable model [V] + AF + ARK AC20B to 50B Nil C D E Residual pressure relief 3 port valve V1 [V] + AF + AFM + ARK AC20C to 40C AC10 to 60 Float type auto-drain (N.C.) (4) [V] + AWK + AFM AC20D to 40D

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).

PSE540/560

between live parts and case (at 500 VDC) 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Impact resistance Temperature characteristics 2% F.S. or less (based on 25C) Piping Specifications R04 N01 Model M3 M5 01 R06 IM5 IM5H

PSxx-OMU0005CN

() 1 V (80 mA ) 1 1.5ms (20,100,500,1000,2000,5000 ms ) 0 2 1~5V 0.6~5V 1 k 4~20 mA 2.4~20 mA 12 V 300 24 V 600 50 0.4 V 5ms -76No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 3 MPa,kPa,kgf/cm 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 2, bar,psi LCD 3 (X2) 1)/ 2) 1)4 7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP65 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH

VM

Release Time Signal/Supply pressure 0.6 MPa Signal/Supply pressure 0.3 MPa VM1 Release time (sec) VM2 Component Parts Piping length (m) Material Note No.

PSxx-OMS0006CN

() 1 V (80 mA ) 1 1.5ms (20,100,500,1000,2000,5000 ms ) 2 0 2, 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 3 MPa,kPa,kgf/cm bar,psi LCD 3 (X2) 1)/ 2) 1)4 (7 ) 2)4 (1 11 7 ) ON OUT1 4 0,10,50,100,500,1000,5000 ms -62No.PS-OMS0006CN-G ZSE20() ZSE20F() ISE20() IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() CE/UKCA UL/CSA(E216656) 2 m 1(0 ms) 2 3MPa/kPa 490 M5 01 N01 C4H C6H

ZSE30A(F)/ISE30A

connector Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included O-ring, one-touch clip included 3 cores, for 1 output, 2 m 4 cores, for 2 outputs, 2 m 3 cores, for 1 output, 2 m O-ring, one-touch clip included O-ring, one-touch clip included Lead wire with connector (with connector cover) 34 ZSE30A(F)/ISE30A Series 2-Color Display High-Precision Digital Pressure Switch

PSxx-OML0002CN

F.S.=514[V] 1F.S.40.010.04[V] F.S. () NPN()() NPN PNP()() PNP R.D. 1.000 5R.D.1.000 50.05 0.800 5R.D.0.800 50.04 ON OFF (29 ) ON OFF Hysteresis ON-OFF /, () () 25[]ON-OFF (copy function) () NPN () () ()()( ) () -11No.PS-OML0002CN-G ON ON 0 (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(K)+1(M)) 4.995(V)0.555 V ) 29 ON-OFF ON () (P1LP1H P2LP2H)ON (29 ) () "digit" () 0 () SI ONOFF () "()"

ZP

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

PSxx-OMG0005CN

5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)) A A PSE200/PSE300 (ZS-28-C) 3M 37104-3101-000FL 1473562-4 XN2A-1430 PSE200 PSE300 -9No.PS-OMG0005CN-E DC+ OUT PSE5615V 1 k DCLINE+ PSE56--28 420 mA 500 (24 V ) 100 (12 V ) LINELINE(+)LINE(-) -10No.PS-OMG0005CN-E (A/D ) () 20 2030 -11No.PS-OMG0005CN-E

100

B2 Supply valve (N.O.) 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire U With light/surge voltage suppressor (Non-polar type) r Rated voltage DC CE-compliant 5 24 VDC V 6 12 VDC V V 6 VDC V S 5 VDC V R 3 VDC V * For type U, only DC voltage is available

PFxx-OMJ0005CN

NPN ) NPN 1 V (80 mA )PNP 1.5 V (80 mA ) 1 s(50 ms0.5 s2 s) 1.5 s 15 V 1 k 420 mA 600 DC24 V 50 5F.S. -54No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 ()30 ms 3F.S.() LED 3 7 2 (/) OUT1ON OUT2ON DC24 V10 55 mA IP40 050 () 050 -1060 () 3585R.H.() AC1000 V 1 50 M (DC500 V ) CE(EMC ROHS )ULCSA 110L/min10009.99 L/min 2100L/min100099.9 L/min 3 ()10024 551005009.5 221002003.8

•

M 4.Types of air. 2.Ensure space for maintenance.

VM

Release Time Signal/Supply pressure 0.6 MPa Signal/Supply pressure 0.3 MPa VM1 Release time (sec) VM2 Component Parts Piping length (m) Material Note No.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR10-OM00007

Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR30-OM00013

Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

1

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P V V V v v Grommet Solid state auto switch 2-wire 12 V M9BV M9B V V V v v Connector H7C

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.