Table of Contents

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Air Slide Table

A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)

LEC-OM02704CN

MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H LE-CSMCNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) (B) 10m 10m 2m 13.4 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) () () .

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Made to Order

M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

240

L : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s2] (Operating condition) a2: Deceleration [mm/s2] (Operating condition) T2 = [s] L 0.5 V (T1 + T3) V T4: Settling time varies depending on the conditions such as motor types, load and in position of the step data.

MXQ

MXQ6(L) 6 19 7 7 M2.5 x 6 12.5 M2.5 x 8 8 2.5 6 8.3 M5 x 0.8 M MXQ-AS6(L)-X11 15 26.5 MXQ-AS8(L) 5 19.5 B MXQ8(L) 7 22 7.5 8 14.6 9 3 7 9.8 MXQ-AS8(L)-X11 M3 x 8 M3 x 10 15 29.5 M6 x 1 F MXQ-AS8(L)-X12 25 39.5 E G MXQ-AS12(L) 5 23.5 MXQ12(L) M4 x 12 M4 x 12 M8 x 1 MXQ-AS12(L)-X11 9.5 29 11 12 18.5 14 4 10.5 12.7 15 33.5 C MXQ-AS12(L)-X12 25 43.5 MXQ-AS16(L) 5 24.5 Table mounting section

One-touch Fittings

L D Q L M *1: D is maximum diameter.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Lubricant: Vaseline X12 Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 AK Ex.) AS1201FM-M5-23-X12 Ex.)

Series AS-FM/AS-M/ASD-FM

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Environment

R A + Stroke B + Stroke Y L S M LEY K Note 2) 4 x O1 thread depth R EH M LES LEPY LEPS Note 1) Range within which the rod can move.

CATALOG

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Table of Contents

L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.

CHKD/CHKG

CHKDB50 -5 (M) CHKDB20 -5 (M) 70 CQ-M10 x 70L 55 CQ-M5 x 55L CHN -10 (M) -10 (M) 75 x 75L 60 x 60L -15 (M) -15 (M) 80 x 80L 65 x 65L CHM -20 (M) -20 (M) 85 x 85L 70 x 70L CHS -25 (M) -25 (M) 90 x 90L 75 x 75L 12.4 -30 (M) -30 (M) 95 x 95L 80 x 80L 15.8 CH2 -35 (M) -35 (M) 100 x 100L 85 x 85L -40 (M) -40 (M) 105 x 105L 90 x 90L CHA -45 (M) -45 (M) 110 x 110L 95 x 95L -50 (M) -50 (M) 115 x