Environment

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

1

0 w o u q!1 !4 JA MXH MXQ CDJ2RA10/16-SZ-B MGP CY CX CJ2RA-TZ CK1 !3 r e !2 yit!0 w o u q !5 !1 !4 C(L)K C(L)KU CKQ CDJ2RA10/16-TZ-B CKZ2N WRF Component Parts No.

Electric Actuator

Table Displacement (Reference Value) W L 0.08 LEF32 (L = 30 mm) 0.06 Displacement [mm] LEF25 (L = 25 mm) 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 0.02 0 0 100 200 300 400 500 Load W [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Refer to section 11.5 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP3 AWG 19(red) AWG 19(white) AWG 19(black) U V U V M W W AWG 19(green/yellow) (Note) Relay connector for extension cable a) (Note) Relay

Electric Actuator

2 3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

LEC-OM02904

MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/) (b) 10m 10m 2m 11.5 2m 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m 50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) AWG 19(/)

AC Servo Motor Driver (Pulse input type/Positioning type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

AC Servo Motor Driver (Network card type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Dual Speed Controller with One-touch Fitting Series ASD

L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Title not found

. 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.

AC Servo Motor Driver (CC-Link Type ）

Refer to section 13.4 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP3 AWG 19(red) AWG 19(white) AWG 19(black) U V U V M W W AWG 19(green/yellow) (Note) Relay connector for extension cable a) (Note) Relay

AC Servo Motor Driver (CC-Link Type ）

Refer to section 13.4 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP3 AWG 19(red) AWG 19(white) AWG 19(black) U V U V M W W AWG 19(green/yellow) (Note) Relay connector for extension cable a) (Note) Relay

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Electric Actuators

2 e w i !1 t !

LEC-OM02704CN

MR-PWS1CBLM-A2-L MR-PWS1CBLM-A1-H MR-PWS1CBLM-A2-H LE-CSMCNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) (B) 10m 10m 2m 13.4 2m MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H LE-CSM50m MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L CNP3 AWG19 AWG19 AWG19 AWG19 / AWG 19() AWG 19() AWG 19() U V W U V W M AWG 19(/) () () .

AC Servo Motor Driver

Refer to section 12.5 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Servo motor Servo amplifier Driver Extension cable CNP3 AWG 19 (red) AWG 19 (white) AWG 19 (black) U V W U V W M AWG 19 (green/yellow) (Note) a) Relay connector for extension cable (Note)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A1 L3 A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

JXCx-OMT0023

Refer to section 11.4 for the wire used for the extension cable. 2m or less MR-PWS1CBL2M-A1-L MR-PWS1CBL2M-A2-L MR-PWS1CBL2M-A1-H MR-PWS1CBL2M-A2-H MR-PWS2CBL03M-A1-L MR-PWS2CBL03M-A2-L LE-CSM50m or less Driver Servo motor Servo amplifier Extension cable CNP1 AWG 19(red) AWG 19(white) AWG 19(black) AWG 19(green/yellow) U V U V M W W (Note) a) Relay connector for extension cable (Note) b)