Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP-7A 10 14 22 25 20, 25 32, 40 50, 63 80 3 4 4 4 4 4.5 5 5 36 51 72 78 44 60 82 88 0.050 0.093 0.065 0.117 0.065 0.117 l m L Note) When using cotter pins, flat washers are used together.

IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or

PSxx-OMM0002CN

* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R NPN2+/ T PNP2+/ S NPN2+/ V PNP2+/ / ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E + -9No.PS-OMM0002CN-F LCD (UP) (SET) ) (DOWN) () LCD 4 (UP) ON/OFF (DOWN) ON/OFF (SET) -10No.PS-OMM0002CN-F

VM

02S 2 R R L C VHK 04F 04F Flame resistant type Flame resistant cover Nil No Bracket Valve model With cover (For One-touch fitting only) L Nil With L-bracket None C 2 port valve 2 3 port valve 3 Flame resistant type Bracket and screws are attached. 1(P) port size 4 04F 1(P) nob color 6 06F Gray Nil (Standard) Blue 2 port valve 3 port valve 2(A) port size 8 08F 10 10F 4 04F Red R (Option)

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F02 (Screw-in G1/4), EXH: F02 (Screw-in G1/4)

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

CATALOG

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Secondary Batteries

pre-wired connectorSDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900 and DY7BW(V)L-900.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

IR1000/2000/3000

0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 5 Series IR1000/2000/3000 Series IR2000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

ITV

Flat bracket Dimensions L-bracket Description Part no.

ITV

min (ANR)) Flow rate (l/min (ANR)) Supply pressure (MPa) Series ITV305m Hysteresis Repeatability Linearity 1.0 1.0 0.9 1.0 0.8 Output deviation factor (%F.S.)

PFMB.eng

[L/min] PF-OMP0003-A

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.