Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

ALF400 to 900, ALT-5/-9

) 8 8 . 0 ( 4 9 . 1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T

PSxx-OMV0008CN

(Er1,2) () ( ) (Er1,2) (Er0,4,6,7,8,9) DC1230 V DC1230 V (Er0,4,6,7,8,9) 6 HHH (HHH) LLL (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) DC1230 V DC1230 V DC(+) DC(-) 7 -80No.PS-OMV0008CN-E No.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

High-precision Digital Pressure Switch ( compatible)

Display/set pressure range -0.105 to 1.050 MPa -0.105 to 1.680 MPa Display/min. set unit 0.001 MPa Proof pressure 1.5 MPa 2.4 MPa Power supply Used as switch output device 12 to 24 VDC 10% with 10% voltage ripple or less (p-p) voltage Electric spec.

High-precision Digital Pressure Switch

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 35 mA or less Protection Polarity protection Display accuracy 2%F.S.1 digit (at ambient temperature 253 oC) Accuracy Repeatability 0.5%F.S. Temperature characteristics (25 oC standard) 3%F.S. 5%F.S. Output type Select from NPN or PNP open collector output.

High-precision Digital Pressure Switch

Display/set pressure range -0.105 to 1.050 MPa -0.105 to 1.680 MPa Display/min. set unit 0.001 MPa Proof pressure 1.5 MPa 2.4 MPa Power supply voltage 12 to 24 VDC 10% with 10% voltage ripple or less (p-p) Electric spec. Current consumption 35 mA or less Protection Polarity protection Accuracy Display accuracy 2%F.S.1 digit (at ambient temperature 253 oC) Repeatability 0.5%F.S.

•

I"P.1/4, .. . , ASP530F-N03-11 S 3/S' ~ 25.9 1 51Jtr 11 / 16" 28.6 ~6~5 ~ 61 ;a.: ~:B-.9 :2D.S 220 tU6' /36,3 . 34:7 .26~ 21.7 . . ~ A efertlllCe dll'l'lerlSlons 1 01 NPT Ihmads aller installalion 3 Speed Controller 5 . ASP w"" P;lo' Ch.,k V,'v. efles Construction Parts list .QesCr;plian ' ''' fi1t~lal , . . .

ITV

1 k or more) 4 to 20 mA (Sink type) (Load impedance: 250 or less) Analog output Output signal (3) (Monitor output) NPN open collector output: Max. 30 V, 30 mA PNP open collector output: Max. 30 mA Switch output Within 1% (Full span) Within 0.5% (Full span) Within 0.5% (Full span) Within 0.2% (Full span) Within 0.12% (Full span)/C 3% (Full span) kPa (4) Minimum display: 1 0 to 50C (With no

Digital Pressure Switch

The unnecessary output should remain unconnected. -27 NPN open collector 2 outputs Max. 30 V, 80 mA, Residual voltage 1 V or less -43 NPN open collector 1 output + PNP open collector 1 output Max. 30 V (NPN), 80 mA, Residual voltage 1 V or less A Pressure set value of switch output for NPN and PNP is common. -65 PNP open collector 1 output Max. 80 mA -67 PNP open collector 2 outputs Max.

F

O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000 D I M E N S I O N S S E R I E S (N)AS1000-M3 1.5MPa / 220PSI Proof Pressure 1MPa / 145PSI Max Operating

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

Digital Flow Switch (Integrated display type)

to 20 mA) output type PFM7--DMax. 28 V, 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 NPN (1 output) + External input type PFM7--GMax. 28 V, 80 mA Internal voltage drop: 1 V or less External input: No voltage input (reed switch or solid state), 30 ms or more -18No.PF-OMJ0006

Pneumatic Positioner IP300/IP3100

(also used for P610) Splined Shaft Fitting Assembly (short) (P) P305010-20 Connecting feedback shalt fo main spindle of actuator, Gauge Adaptor (w) NPT Run Tee fitting gauge installation (90") Gauge Adaptor (Y) Branch Tee litting gauge installation (90") G43-P2-N01 or KSlOB-SD2 For SlG, pressure range 0-30psi, 1/8 NPT A (+v) \

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.6 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)0.8 to 5 V ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN 1 output, NPN 2 outputs, PNP 1 output, PNP 2 outputs80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above)Variable (0 or above)1 to 5 V ?2.5% F.S.?