Pressure Range: 0 to 1 MPa, Piping: G 1/4, ISO 1179-1 Compliant, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: ISE70G (0 to 1 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Pressure Range: 0 to 1 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

2-Color Display Digital Flow Switch Series PFM

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: None, Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only)

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type])

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type])

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

This is a legacy product, and replaced byISE70-F02-L2-L, PRESSURE SWITCH, DIGITAL, INSTRUMENTATION, ISE70/75 PRESSURE SWITCH, D7, ISE70/75 1/4 EURO VERSION, 1.07473 lb

Pressure Range: ISE70 (0 to 1 MPa), Piping: F02 (G 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B)

PFxx-OMJ0005CN

() N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

S S OUT IN OUT IN IN IN Bottom With display rotating function One-touch fitting 8 Female thread Rc, NPT, G 1/4 OUT IN OUT IN S S IN 1 IN 1 Functions Bypass structure Sensor unit Protruding part (Refer to page 15 and 16 for details.)

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMM0002CN

C01 A2 B2 R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 () 117 g 118 g 114 g 120 g 111 g () 89 g 90 g 86 g 86 g 92 g 83 g 110 -5 Pam 3/s 110 -10 Pam 3/s A B C 0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.