ASD

L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Inch Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Inch Size Model Applicable tubing O.D. d T H D1 D2 D3 L1 L2 L3 A1 A2 Max. Max. Min. Min. Max. Min.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

Compact and Lightweight

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

VM

1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

ISE7xG.eng

Piping Piping specification: -02 and -N02 After hand tightening, tighten the fitting using a spanner on the flat surfaces of the fitting. The tightening torque must be 8 to 12 Nm.

ASP

Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.

VM

1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

PSxx-OMV0003CN

-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

2

T-Spacer: (T) 1/8, 1/4, 3/8 E Using a T-spacer facilitates the branching of air flow.

•

-lb2 09i\ ' -5f -16'~ .. , AS . ~43b'F~N02-07S 114' '" " " ,. , , 18,5 15 18 jl~' 11/1~ 1 _ , 10.2 # 23 19.8 20.3 2 3.1 18.5 ASP530F-NOJ...09S 5/ 16" NPT3/8 NPT1/8 5 1.3 28.2 41.9 56.2 50 3 l B.7 107 I 46.9 14.4 54 .1 32.6 20.8 11 6 19 I 112 (}I .-2 ; :)2.6 . " . " ... t AS P6:1oF.,..ci4:'M' .. .. -31&" ; ~~T; 12 . .. . I AS~'Nl>?f3S ~ ~ fit ' ..

S Couplers

T T 26 13 H L1 L1 H L3 (mm) (mm) H Width across flats 18 28 38 73 18 28 38 73 H Width across flats 90 92 91 117 90 92 91 117 When connected T Connection male thread T Connection male thread Min. hole size Min. hole size Weight g Model Weight g Model L1 L2 L1 Full length L3 KK130S(L)-01F -02F -03F -04F KK130P-01F -02F -03F -04F 53.0 62.5 66.5 76.0 53.0 62.5 66.5 76.0 Rc1/8 Rc1/4 Rc3/8 Rc1/

F

T H O N E-T O U C H F I T T I N G S D I M E N S I O N S (N)AS1000-4000 Model Applicable D1 D2 L1 L2 L3 M1 Weight Model Applicable D1 D2 L1 L2 L3 M1 Weight Tube OD : d Max Min gf (Inch) (Metric) Tube OD : d Max Min gf 7.8 10 41.1 4.4 14.5 1/8 23.4 20.6 5.8 NAS1001F 3.2 7.8 41.1 4.4 23.4 20.6 14.5 5.8 8.9 42.3 4.9 5/32 24 21.2 6.2 AS1001F 10 4 8.9 42.3 4.9 24 21.2 6.2 14.5 8.9 43.8 5.2 5/32

I

lamp L1 Neon lamp 110vAC L2 Neon lamp 220vAC (not available for microload switches) L5 LED indicator DC 24V P O R T S I Z E M I C R O S W I T C H T Y P E 0 Standard 1 Microload Flange Mounted 02 Rc(PT) 1/4 N02 NPT 1/4 Courtesy of Steven Engineering, Inc. !

20

VMG11-02-X35 VMG11-03-X35 VMG11-N02-X35 VMG11-N03-X35 VMG11-F02-X35 VMG11-F03-X35 Pipe part no. P5670127-100-X33 P5670127-300-X33 P5670127-600-X33 Part No.