Pressure Range: 0 to 1.6 MPa, Piping: G 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

2-Color Display Digital Flow Switch Series PFM

Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/

0.01

(L/min (ANR)) SFD100-C06 SFD200-C10 0.04 0.04 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 0 100 200 300 400 500 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) SFD100-C08, -02, -N02, -F02 SFD200-C12, -02, -N02, -F02 0.04 0.04

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FG Flow rate L/min (ANR) Flow rate L/min (ANR) AS-FP AS-FM AS-D AS-T AS-D AS-T ASP Number of needle

Speed Controller: Standard Type Series AS In-line Type

min (ANR) Effective area (mm2) Flow rate l/min (ANR) Flow rate l/min (ANR) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) AS Number of needle rotations Number

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

L/min 0.5 to 0.5 L/min range 2 to 200 L/min 5 to 500 L/min 150 to 3000 L/min 0 to 1 L/min 0 to 3 L/min 1 to 1 L/min 3 to 3 L/min 10 to 1000 L/min 1 to 50 L/min 10 to 100 L/min 20 to 200 L/min 300 to 6000 L/min 2 to 100 L/min 600 to 12000 L/min Power supply voltage 24 VDCp10% 24 VDCp10% 12 to 24 VDCp10% 12 to 24 VDCp10% (25C reference) characteristics p3%F.S.(15 to 35oC) p2%F.S.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: None, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: None, Operation Manual/Calibration Certificate: None

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: Rc 1/4, Output Specification: Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: -

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70