Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor)

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor)

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Table of Contents

U side mounting D U Symbol Plug assembly (Option) Refer to page 3-8-8.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

VZS

51F Manifold block u, Junction box i, Lead wire assembly !

Air cylinder (Series compatible with secondary batteries)

Grease C a u t i o n Use SMCs recommended grease. Grease pack part number: GRD -005 (5g), GR-D-010 (10g), GR-D-100 (100g) 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to mount the rod seal and improve sealing.

VCA

side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

VCA

side, side ported) End plate assembly (U side, side ported) 6 6 Al Al End plate assembly (U side, front ported) End plate assembly (U side, front ported) Note 2) O-ring is included with manifold valve .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Metaljoint O, O.Gasket O, O.o+ing O,O Non plug-in type o End plate (kit) ass'y MEF463LR-04-1End plate (U) (E , End plate (D) O . Metal joint/clamp O , O. Gasket O, O, O-ring O, @ Plug-in type (E MEF473LR-04-1 End plate (U) lO , End plate (D) O . Metal ioint/clamp O ' O.

-fl Seies

Metaljoint O, O.Gasket O, O.o+ing O,O Non plug-in type o End plate (kit) ass'y MEF463LR-04-1End plate (U) (E , End plate (D) O . Metal joint/clamp O , O. Gasket O, O, O-ring O, @ Plug-in type (E MEF473LR-04-1 End plate (U) lO , End plate (D) O . Metal ioint/clamp O ' O.

Microspeed Cylinder

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

I

(8.3Z0OOHz) Etrclcure Dust oroof Symbol SlngNe t{VFsl2O Doubr. ilvF522o Exh.urt C.r{or VF542O Clo6d Canlor ilVF532O B A ry'{\TlrrllTlnn ruNTll-Tff7}u, qdi!

ZB-OM00301

/ PVPD ZZB-SM5 ZB31-Q1L(O)E F D U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g 5 + 5g 5 + 41g 266g 37 - No.ZB-OM00301 0.3 N.C. / ZB03-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.4 N.C. / ZB04

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor), Coil Orientation: Upward, Blow Port Position: Coil Orientation Upward: Bottom; Coil Orientation Downward: Top, Oil-free Option: D (Oil-free)

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 3 [120 (110) VAC], Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor), Coil Orientation: Upward, Blow Port Position: F (Front)

Size: 30, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: NPT, Rated Voltage: 24 VDC, Electrical Entry: M12 Connector/without Connector Cable; with Surge Voltage Suppressor, Coil Orientation: Upward, Blow Port Position: Front, Oil-free Option: -

Size: 30, Body Material: Aluminum, Seal Material: NBR, Port Size: Orifice Diameter: ø4mm; Port Size: 3/8, Thread Type: NPT, Rated Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Light, w/Surge Voltage Suppressor, Coil Orientation: Upward, Blow Port Position: Front, Oil-free Option: -

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: WN (M12 Connector/without Connector Cable; with Surge Voltage Suppressor), Coil Orientation: Upward, Blow Port Position: F (Front)

Size: 3 (30), Body Material: A (Aluminum), Seal Material: N (NBR), Port Size: 403 (Orifice Diameter: ø4mm; Port Size: 3/8), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Coil Orientation: Upward, Blow Port Position: F (Front)