Table of Contents

AC10A G27-10-R1 G27-10-R1 AD17 Y100 AC30A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC20A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 AC40A-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40A G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) Model Description Round type 1.0 MPa (1) (2) Square embedded type Pressure gauge Accessory (3) Round type 0.2 MPa (2) Square

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

14 14 (Lead wire length) 71.4 About 300 98.6 79.4 [82] 52.6 [59.1] About 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 28 5-M5 0.8 (Piping port) 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 27 Series SYJ3000 Valve Drawings 3

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting the R1/8 pressure gauge to the R1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

VQ4000

light (12.5) (12.5) SY 5 3 4 2 SYJ 9 38 48 A B 38 24.6 10.5 48 11 1 A SX 4 2 3 5 1 14 12 13.5 13.5 30 45 25.6 Mounting hole 30 45 VK Manual override 25.6 Mounting hole 5-Rc1/4, 3/8 (R1, R2=Rc1/4) VZ Bottom piping VF SMC (A, B port) 27 VFR 79 VP7 PE X 41.5 30.5 32 27 R1 R2 VP4 P 14.5 19.5 19.5 Rc1/8 External pilot port Rc1/8 PE port 5-Rc1/4, 3/8 P, A, B, R1, R2 port (21) (21) 31 31 VQ ( )

Best Pneumatics Vol. 14

AC10A G27-10-R1 G27-10-R1 AD17 Y100 AC30A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC20A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 AC40A-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40A G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) Model Description Round type 1.0 MPa (1) (2) Square embedded type Pressure gauge Accessory (3) Round type 0.2 MPa (2) Square

VQ5000

) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1) 3 (R2)

ZP

P.48 ZP3A-Y3-B5 P.48 ZP3A-T3-B5 42 Series ZP3 Buffer Applicable Pad List Buffer Assembly Part No. Applicable pad part no. Applicable pad part no. Page Buffer assembly part no. Series ZP3 Buffer assembly part no.

ZP

) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Modular F.R.L. Unit

AC10A AC20A AC30A AC40A AC40A-06 Model Description Round G27-10-R1 G36-10-01 G36-10-01 G46-10-02 G46-10-02 Note 1) 1.0MPa Square embedded type Note 2) GC3-10AS GC3-10AS GC3-10AS GC3-10AS Accessories Pressure gauge 0.2MPa Round G27-10-R1 Note 3) G36-2-01 G36-2-01 G46-2-02 G46-2-02 Square embedded type Note 2) GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 4) N.O.

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

Proposals for Energy Saving

Accessory (option) part nos. 0.2 to 1.0MPa Ambient and fluid temperature 2 to 50C (with no freezing) Model VBA2200 VBA2100 VBA4200 VBA1110-1 VBA4100 Description Pressure gauge G27-20-R1 2 pcs. G46-10-01 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs.

Series SV

General purpose Each T unit has 32 control points. 16 outputs 24VDC 10% External power supply A, B, D, E, F1, G, J1, J2, K, R1, R2, H, U, V Current consumption (Inside unit) 0.1A 0.3A C, Q SI manifold solenoid valve T unit OB unit SI unit SI unit Master unit Remote I/O unit Remote I/O unit S1 S2 SG S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG SDA SDB RDA RDB SG FG

VZS

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

Cylinder with Lock

Lock Unit Specifications Made to Order Common Specifications (For details, refer to pages 46 to 48.)

SV

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

XL

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

High Vacuum Angle Valve, XL Series

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

ZP

Bellows Bellows Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 6 F G: M6 x 1 G: M8 x 1.25 G: M5 x 0.8 G: M6 x 1 L Y Model K A B C D E A B K C D E L Y Model F F F ZPY40B ZPY50B ZPY10B ZPY13B 40 50 43 53 34 38 44 48 62 66 24.4 32.4 48 57 16 19 10 13 12 15

Fieldbus System

) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.