Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

Digital Gap Checker

The sub screen display can be selected from 6 display options.

Lubrication Equipment

Applicable tube O.D. 6 6 Oil Distributor Number of distribution ports (VA) (VB) VB6-6 Distribution 4 ports 6 ports 8 ports 4 ports 6 ports 10 ports 16 ports 4 6 8 4 6 10 16 Both sides exhaust One side exhaust A B VA4-6 Dimensions VAl-6 VBl-6 A B C Model # Ports Applicable tubing 4 6 10 16 36.5 60 88 130 VA4-6 VA6-6 VA10-6 VA16-6 Model # Ports Applicable tubing A B C 82.5 110.5 152.5 48 76

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Dedicated Controller

Female terminal 6 5556PBTL Wiring tools [Manufacturer: Molex Japan Co., Ltd.] Wiring tools should be provided by customer.

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

XM, XY

Note) Bellows seal Particulate free XMC XYC Atmospheric pressure to 1 x 10-6 Note) Double acting XMD XYD Reduces particulates Eliminates pump overload Single acting (N.C.) Bellows, O-ring seal Standard PAT. PAT. Manual XMH XYH Atmospheric pressure to 1 x 10-6 Manual Particulate free Bellows seal Note) Standard Standard Note) The in-line valve is not available in flange size 16.

Air-hydro Unit

W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data

CATALOG

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !

LEC-OM07605CN

(2) LECSS2-T8 [:mm] 40 6 (80) 170 6 6 CNP1 CNP2 161 156 168 CNP3 6 (21) LEC-MRBAT6V1SET (69.3) 6 PE (38.5) LEC-MR5 BAT6V1SET 1.0 [kg] M5 CNP1 CNP2 CNP3 3.24 [N m] L1 P+ U (40) 2-M5 6 C D V L2 (6 ) L3 W NP3 L11 L21 P4 1560.5 (168) PE M4 1.2 [N m] (6) 9 3 9.

Table of Contents

Note 6) When the current output is selected.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

V

0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7 1 VX2-03 3 0.33 6 Steam 1.6 1.2 1 VX2322-03 3 0.33 6 0.45 0.3 0.3 0.45 VX2232-03 4.5 0.61 11 1 3/8 (10A) 0.8 0.6 0.6 0.87 VX2332-03 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-03 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-03 6 1.05 19 H O W T O O R D E R S E R I E S V X VX21 22 23 B R A C K E T Nil Without B With Bracket

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

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avaiab e 20mm lo 6.lmm cn y i 6-,,cylinder stroke (mm) Nole) Sriqe act n!

SMC Electronic Switch Series Variations

ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

*5 *6 When the driver type is selected, the cable is included.