SV

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

5

Bore size (mm) A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

CV/MVGQ

Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

Up to 600 Up to 750 Up to 750 The minimum stroke of the one with rod boot is 20 mm or more.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

VQ5000

) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1) 3 (R2)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. F G T NPTF (Ordering example) ZXX106-R1 pc. (Manifold base) ZX1101-K15LZ-EC5 pcs. (Vacuum single unit) ZX1-BM11 pc.

SX

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

Smooth Cylinder/Low Speed Cylinder

A A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 Applicable bore size (mm) 20 25, 32 40 Bore size (mm) 20 25, 32 40 Part no.

Series VQ Base Mounted Metal Seal/Rubber Seal

Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

VQZ 1 (P) 5 (R1) 3 (R2) Port plug mounting port VQD 3 position exhaust center (A) 4 (B) 2 Nil A B 4 None Port 4(A) 1 (P) 5 (R1) 3 (R2) Port 2(B) 3 position pressure center (A) 4 (B) 2 5 Cylinder port 1 (P) 5 (R1) 3 (R2) C3 C4 C6 M5 L3 L4 L6 L5 One-touch fitting for 3.2 4 position dual 3 port valve One-touch fitting for 4 (2) (A) 4 (B) 2 Side ported A One-touch fitting for 6 5 (R1) 3 (R2)

Table of Contents

Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).

AC

G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.