-fl Seies

-% , , ",",""" 1l-,:e!"6 ,tL--!9!!",qL+r |L-.!.S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

Title not found

Function | . l Seal type N/eta seal Low wanage lype (0 5W) Note) For rlbber sea type ony l.lo:e 1l Formela sea lype ony Note 2) When specl'rng more than one oplron enlersymbols nalphabelical Note3) Roplon.otavarabletor4poslion dua 3 port vares lTvpe oJ actLraton A , 8 C ) Also available VO5000 manifold Two 3 port valves built lnlo one body.

SS5Y3 OTHER SIZE RATING. .63099 lb. 1L.

ZP OTHER SIZE RATING. .01141 lb. 1L.

ZP OTHER SIZE RATING. .05511 lb. 1L.

ZP OTHER SIZE RATING. .01902 lb. 1L.

ZP OTHER SIZE RATING. .27557 lb. 1L.

ZP OTHER SIZE RATING. .03390 lb. 1L.

ZP OTHER SIZE RATING. .08177 lb. 1L.

ZP OTHER SIZE RATING. .06977 lb. 1L.

ZP OTHER SIZE RATING. .01494 lb. 1L.

ZP OTHER SIZE RATING. .02004 lb. 1L.

SS5Y3 OTHER SIZE RATING. 1.08748 lb. 1L.

SS5Y3 OTHER SIZE RATING. 1.05506 lb. 1L.

SS5Y3 OTHER SIZE RATING. .33000 lb. 1L.

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

•

Weight(gt) Calculation method E)(ample : CKS 1 :l40 -100Y ~ P H 1L Switch No. D-PH1L, PH9L 400 ... .. . . 0.74 ( . 40) Basic weight . D-PH1Z, PH9Z 550 Additional weight .. 0. 10/ 25 stroke .

7

resistant and applicable VXS to deionized water 1, 4 (Seal material: FKM) Port thread3 Oil-free 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Grommet (With surge voltage suppressor) Nil A B C D E F G H K L Z Rc, With One-touch fitting2 VXB G NPT Rc, With One-touch fitting2 Grommet VXE Grommet (With surge voltage suppressor) 1E 12 VDC G NPT G NPT Rc, With One-touch fitting2 1F 1G 1H 1V 1J 1K 1L

3

Electrical option VXZ Symbol Oil-free Port thread Nil Rc A G B NPT D G E NPT Z Rc Specification Symbol Voltage Electrical entry 1A 48 VAC Grommet With surge voltage suppressor VXS VXS 1B 220 VAC 1C 240 VAC 1U 24 VAC 1F 48 VAC DIN terminal With surge voltage suppressor VXB VXE 1G 220 VAC 1H 240 VAC 1V 24 VAC 1K 48 VAC Conduit terminal With surge voltage suppressor Special voltage VXP VXR 1L

Table of Contents

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (