Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.

Environment

2 !

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Top entry Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Without cable Without cable Without cable Note 2) Note 2) Note 2)

Table of Contents

0.5 to 4 30 30 0.5 to 4 Y 2 L2 2 11.5 to 22 L1-2 X 5 W2 = 13.5 to 30 0.5 to 5 40 40 0.5 to 5 Y 4.5 L2 2 15.5 to 30 L1-2 X 5.5 11-2-32 32 Simple Specials Series CRB2 Simple Specials Series CRB2 Axial: Top (Long shaft side) Symbol: A47 Machine a keyway into the long shaft.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.5 to 4 30 30 0.5 to 4 Y 2 L2 2 11.5 to 22 L1-2 X 5 W2 = 13.5 to 30 0.5 to 5 40 40 0.5 to 5 Y 4.5 L2 2 15.5 to 30 L1-2 X 5.5 11-2-32 32 Simple Specials Series CRB2 Simple Specials Series CRB2 Axial: Top (Long shaft side) Symbol: A47 Machine a keyway into the long shaft.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.5 to 4 30 30 0.5 to 4 Y 2 L2 2 11.5 to 22 L1-2 X 5 W2 = 13.5 to 30 0.5 to 5 40 40 0.5 to 5 Y 4.5 L2 2 15.5 to 30 L1-2 X 5.5 11-2-32 32 Simple Specials Series CRB2 Simple Specials Series CRB2 Axial: Top (Long shaft side) Symbol: A47 Machine a keyway into the long shaft.

CRB2/CRBU2/CRB1

Inertial moment . 3.5 x 10-6 kgm2 2 t E = I 2, = 1 2 Rotation time . 0.12s/90 CRB2BW, CRBU2W20 are selected in this case. 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

Stability of suction position,

2 !2 !3 !4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

ITV

Exhaust port 35.7 G G OUT 2 EXH (3) PPA SUP (2) SUP (1) 22 8 AL 36 Flat bracket P3020114 (Optional) 2 x Rc1/4, 3/8, 1/2 Port size 4 x M5 x 0.8 thread depth 6 mm through Mounting hole L-bracket G OUT 2 22 30 R3.5 25 15 25 7 36 L-bracket INI-398-0-6 (Optional) (10) 30 45 2.3 2 x Rc1/4, 3/8, 1/2 SUP port, OUT port (7) 36 14-8-25 26 Series ITV1000/2000/3000 Made to Order Specifications: Please

Environment

2 !

ITV

35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications Contact SMC regarding detailed dimensions

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

S2 S1 Filter regulator Effective area ratio 10.7 : 1 Pressure loss: Small S coupler Coil tube Nozzle 2 2 Pressure Loss of Blow Gun Only Effective area (mm2) Upstream side S1: 30 Nozzle side S2: 2.8 Effect of Energy Saving Improvement S1 : S2 = 10.7 : 1 Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure Regulator pressure Outlet pressure Pressure loss 2 1 Air consumption

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.