C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

C95

25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5

Table of Contents

The manual lever (1.6 x 35l, tip part: M1.6 x 0.35 x 3l) is included with the cylinder. If additional manual levers are required, use the following part number to place an order: CXS06-48BK2777 (for all series). 8-29-19 20 Series CXS Construction: Slide Bearing CXSM6 q e r u !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Nil Without lead wire Symbol Description M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.

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(800) 526-7661 Parallel Run LTees 3/8 7/16 1/4 5/16 5/16 1/4 5/16 1/4 8 T1-L1-1 T4-L4-4 T3-L3-3 T2-L2-2 Parallel Run Reducing LTees 3/8 5/16 5/16 5/16 3/4 15/16 5/16 5/16 5/16 5/16 5/16 5/16 1/4 1/4 MEM 27/32 5/8 5/8 3/4 9 RT3-2L-2 RT3-2L-3 RT4-3L-4 RT1-3L-1 RT3-1L-1 RT2-3L-2 1 11/16 Crosses 1/2 15/16 5/16 5/16 11/16 15/16 MEM 1/4 27/32 1 1 33/64 5/8 15/16 3/8 11/16 1 1/8 1/4 5/8 27/32

Table Accuracy: H (High Precision), Size: 10, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: L (Entry on the Left Side), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Entry on the Left Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for JXC

ZSE30A(F)/ISE30A

Option Note ZS-38-A1 ZS-38-A2 ZS-38-A3 ZS-27-C ZS-27-D ZS-27-01 ZS-38-3L ZS-38-4L ZS-38-3G ZS-38-4G ZS-38-5L ZS-38-U ZS-38-C4H ZS-38-C6H ZS-38-N7H ZS-38-C4L ZS-38-C6L ZS-38-N7L Bracket A Bracket B Bracket C Panel mount adapter Lead wire with connector (with connector cover) Lead wire with a connector for copying Lead wire unit with a connector for copying One-touch fittings 4 mm straight

1

C85 Series CY1B Series REA C95 Bolt fixed from the upside CP95 Herisert tapped NCM F Note 1) For 6, 10 (CY1B) NCA R Note 2) Bolt fixed from the underside: MD D-X 20Body For 6, 10 (CY1B) Data F (1) MM LA R (2) L PA C HB M B HA W MD A Bore size (mm) 6 10 15 20 25 32 40 50 63 M3 x 0.5 x 3l 15 35 12 11 17 6.3 18 10 2.5 M3 x 0.5 x 3l 18 38 17 15 25 9.5 26 10 2.5 25 57 25 6.5 23 4 35 16.5

Made to Order

CY3B series REA series Bolt fixed from the upside Herisert tapped F Note 1) R Note 2) For 6, 10 Bolt fixed from the underside: MD Body For 6, 10 B F (1) A C HA HB L LA MM MD M PA R (2) W Bore size (mm) 6 10 15 20 25 32 40 50 63 10 17 2.5 6.3 11 35 15 M3 x 0.5 x 3L 12 18 10 25 2.5 9.5 15 38 18 M3 x 0.5 x 3L 17 26 16 35 5.5 16.5 23 57 25 25 36 M4 x 0.7 6.5 M3 4 6 18 36 5.5 17 23.5 66 30 27

HEC_W-E

temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 8 L/min Approx.900W(water), 600W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 8 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN HT-135 Fluorinert FC-77, FC-3283) Recirculating fluid Reservoir capacity : Approx.3L

CY1

Construction/Dimensions (mm) R Note 2) F Note 1) PA M MD MM LA L C HB B HA W Model A CY1B 6 12 M3 x 0.5 x 3l 15 17 6.3 11 35 18 10 2.5 CY1B10 17 M3 x 0.5 x 3l 15 38 18 25 9.5 26 10 2.5 CY1B15 4 25 M3 57 25 M4 x 0.7 6.5 23 16 35 5.5 16.5 6 36 CY1B20 27 4 30 M4 x 0.7 M3 66 18 36 6.5 5.5 17 23.5 6 37 CY1B25 36 M5 x 0.8 M4 5 30 46 8.0 21 28.5 70 47 20 5.5 7 CY1B32 M5 6 47 M6 x 1.0 9.5

CC

Or for applications in which a pneumatic speed controller suffices (3l/min).

IR1000/2000/3000

0.2% of full span Repeatability Within 0.5% of full span Linearity Within 1% of full span Note 3) Bleed port: 9.5l/min (ANR) or less (supply pressure: 1.0MPa) Exhaust port: 2l/min (ANR) or less (at maximum set pressure) Bleed port: 9.5l/min (ANR) or less (supply pressure: 1.0MPa) Exhaust port: 2l/min (ANR) or less (at maximum set pressure) 4l/min (ANR) or less (supply pressure: 1.0MPa) 3l

Shock Absorbers and Rate Controls

hlog l{0, u'lodel) A A, I D t l H K (tR)Otlll l.5ilr I 144 162 5l |il4z x 1.5 t3 38 44 9Z 46 'Jl 32 (1Rl0tl,ll.5lllx2 r95 213 5t M42 x 1.5 t3 38 44 E 59 3l 45 0 tl.5tlx3 246 ?64 5l M4? x 1.5 l3 38 44 143 37 (LR)0Iil2.0llx2 226 243 t3 M64x2 t9 50 57 140 70 48 50 0Ifi2.0Sx4 328 345 1164 x 2 t9 50 57 l9l 96 48 t6 0t 2.0tlxd 456 413 73 M 6 4 x ?

ZSE20(F)_ISE20

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7

I

+0.1MPa Note 2) Air is always bleeding to atmosphere Regulating 3000: 0.01~0.2MPa 0.005~0.8MPa 0.01~0.8MPa Pressure 3010: 0.01~0.4MPa Range 3020: 0.01~0.8MPa Sensitivity 0.2% FS Max H O W T O O R D E R P R E C I S I O N R E G U L AT O R S E R I E S IR1/2/3000 Repeatability +0.5% FS Max Air Supply Pressure at 1MPa <9.5l/min (Bleed P) <4l/min <9.5l/min Consumption at 0.7MPa <2l/min (EXH) <3l

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Response time Liie VOZ]000I0 rns -l VOZ2000 l2 ms 1 200 rfillion VoZsooo ls ms -l cYcres DIN rail mounting 3 Port Solenoid Valve Metal Seal/Rubber Seal 5 Port Solenoid Valve Metal Slsal/Rubber Seal Base Mounted Up to 063 0 . 1 7 0 3 3 0.39 0 4 5 o.3l 0 r 0 0 4 5 0.56 N C Vdlve Base Mounted N C .

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Body Size: 40, Motor Type: F (High Performance, Step Motor 24 VDC), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: S5 (5m), Controller: C9H (JXC9H