LVQ

LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

) 114 VN LVC 53 63 43 LVA LVH LVD LVQ LQ LQ-GM LQ-GL LVN 50 TI/ TIL 50 207 85 PA 342 85 PAX LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60 87 60 112 112 17-5-129 34 Series LQ 1 2 Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Industrial Filters

) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400 267.4 230 510 915 1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935

OMR0032

LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Model d T1 T2 H1 H2 D1 D2 L1 L2 L3 L4 A * M ASP330F-01-06S-X369 R1/8 M5X0.8 12 8 14.2 20.4 27.5 13.6 38.6 35.2 13.5 6 11.6 ASP430F-02-06S-X369 25.2 34.4 18.3 16.8 R1/4 17 18.5 48.7 42.4 ASP430F-02-08S-X369 27.2 36.4 18.4 18.5 Rc1/8 12 8 15.2 ASP530F-03-08S-X369 29.7 41.2 18.7 R3/8 19 23 21 56.2 50 ASP530F-03-10S-X369 31.6 43.1 20.8 10 18.5 ASP630F-04-10S-X369 33.6 47.9 25.6 20.8 R1/2 Rc1/

One-touch Fittings

Tubing size Tensile force of tubing [N] 2, 3.2, 1/8" 5 4, 5/32", 3/16" 8 6, 1/4" 12 8, 5/16" 20 10, 3/8" 30 12, 1/2" 35 16 50 2) Removal of tubing (1) Push the release button flange evenly and sufficiently to release the tube. Do not push in the tubing before pressing the release button. (2) Pull out the tubing while keeping the release button depressed.

Table of Contents

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

33

/60 Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230 VAC (50/60 Hz) Triple control Compressor, fan and electronic control valve can be controlled depending on the heat load from the user s equipment.

Rotary Gripper Series MRHQ

50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 0.6MPa 0.6MPa 10 10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang

MRHQ

50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MHS MRHQ16 MRHQ16 MHC Internal gripping 60 60 Pressure 0.2MPa MHT 50 50 Pressure 0.2MPa Overhang H mm Overhang H mm MHY 40 40 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.3MPa MHW 0.5MPa 0.5MPa 0.6MPa, 0.7MPa 0.4MPa 20 20 0.6MPa 0.5MPa MRHQ 10 10 Misc. 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point

K35-OMX0029

P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

Speed Controller with One-touch Fitting

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 573 to 575 for Specific Product Precautions. Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Body Size: 16, Type: R (Standard), Motor: A [Servo Motor (DC24V)], Lead Screw: K (Size 8: 4mm, Size 16: 5mm, Size 25: 8mm), Stroke: 50mm

Body Size: 16, Type: Standard, Motor: A [Servo Motor (DC24V)], Lead Screw: Size 8: 4mm, Size 16: 5mm, Size 25: 8mm, Stroke: 50mm, Lock: -, Body Option: -, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating