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Liquid dripping: 0.02 to 0.06 cm3 at each removal Aeration: 0.1 to 0.2 cm3 at each removal VMG Socket valve Plug valve Non-greased specifications (standard) O-ring: Fluorine coated Sliding parts of plug and socket: Plated with fluorine-contained material Allows smooth installation and removal even without grease Fluid: Water, Air Operating temperature range: 5 to 100C Note) Do not use

Process Pump <Fluororesin Type> Series PA3000

(with no freezing or heat cycle) Ambient temperature 0 to 100C (with no freezing or heat cycle) Pilot air pressure 0.2 to 0.5MPa Proof pressure 0.75MPa Mounting orientation Horizontal (with mounting hole on the bottom) Weight 2.1kg (without foot) PA: Standard Assembled and packaged in a standard environment Assembling environment PAP: Clean room Assembled and double-packaged in clean-room

Air/Manually Operated High Purity Chemical Valve Series LV

Table symbols : Can be used : Depends on conditions X: Cannot be used Compatibility is indicated for fluid temperatures of 100C or less. Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

(-4 to 212F) Ambient temperature Note 1) 10 to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC

Soft Nylon Tubing TS/TISA Series

There is a possibility of plasticizer and other materials precipitating on the tube surface and detracting from the cleanliness level of the room. 40 to +100C, Water: 0 to +50C (No freezing) Nylon 12 Operating temperature Note 2) Material Note 1) Refer to the Printing/Fluid.

T/TIA

(mm) 2.5 3 4 4.5 6 7.5 9 13 2.18 3.48 4.57 6.99 9.56 Black (B) Max. operating pressure (MPa) White (W) TIA Series Red (R) Blue (BU) T1613 Yellow (Y) Green (G) T0403 Other metric size Nominal size (inch) 5 32" 5 16" 1 4 3 8 " 3 16" 1 8 " 1 2 " " Nominal size (mm) 0.0 40 20 0 20 40 60 80 100 Specifications 3.2 Operating temperature (C) Fluid Air/Water 20C or less 40C 60C 80C 100C 3.3 2.3 1.65

The VC enclosure is IP65 equivalent.Multipurpose valve for oil, Withstand pressure: 5.0MPa, Ambient temperature: -20 to 60C (Standard) -20 to 100C (High temp.), Fluid temperature: -10 to 60C (Standard) -10 to 100C (High temp.), Valve leakage cm¦/min: 0 (with oil pressure), VALVE, COMPACT FOR OIL, VALVE, VC* VALVE, 2-PORT SOLENOID, 2A, VC* NO SIZE RATING, 0.97003 lb

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(Equivalent to IP44) 90C 47C (50C) or less Splashproof/ Low jetproof type (JIS C 0920) 35C (40C) or less 100C Note) ( ) For IF32 To protect the microswitch, ambient temperature must be lowered when the fluid temperature exceeds 70C.

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.5 m Dry Suction lift 4 m Wet VX3 0 to 100C (Not be frozen. Do not apply heat cycle.) Operating fluid temperature 0 to 100C (Not be frozen. Do not apply heat cycle.)

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) Steam system (Boiler water) Steam system (Condensate) Insulation oil Parachloroetylene Brake oil Water (up to 99C) Ethyl alcohol Ethylene glycol Caustic soda (25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (up to 100C) Steam system (Boiler water) Steam system (Condensate) Insulation oil Naphtha Parachloroetylene Brake oil Water (up to 99C) Note) If using for other fluids, please

Series VCL

(-4 to 212F) Ambient temperature Note 1) 10 to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC

Size: 16, Motor Mounting Position: D1 (In-line; Motor Cover Direction: Left), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R5 (5m)

Size: 16, Bearing Type: M (Sliding Bearing), Motor Mounting: D (In-line Type), Motor Type: Step Motor (Servo/24VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (with Motor Cover), Guide Option: w/o Guide, Actuator Cable Type: R (Robotic Cable - Flexible cable), Actuator Cable Length: 5 (5m)

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: B (Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)

Series: LEY, Size: 16, Motor Mounting Position: D3 (In-line, Top Side), Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R5 (5m)

Size: 16, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)

Size: 40, Motor Mounting Position: D (In-line Type), Motor: Step Motor (Servo 24 VDC), Lead Screw: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m)

Series: LEY, Size: 16, Motor Mounting Position: In-line, Top Side, Motor Type: High Performance Battery-less Absolute, Step Motor, 24 VDC, Lead: Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: 5m, Controller: -, Controller

Size: 16, Motor Mounting Position: Top Mounting, Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: 5m, Controller: -, Mounting: -, I/O Cable: -, Communication Plug Connector: -

Size: 16, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: w/Motor Cover, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 5m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -,