Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

RQ

Example) Bolt M5 x 50l 4 pcs.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Hydraulic

Example: M5 x 50l 4pcs.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

Battery-less

. *3 Position after returning to origin *4 [ ] for when the direction of return to origin has changed Dimensions [mm] Model L A B n D E F Without lock With lock LEFS25El-50l 285.5 330.5 56 160 4 20 LEFS25El-100l 335.5 380.5 106 210 4 LEFS25El-150l 385.5 430.5 156 260 4 LEFS25El-200l 435.5 480.5 206 310 6 2 240 LEFS25El-250l 485.5 530.5 256 360 6 2 240 LEFS25El-300l 535.5 580.5 306 410

CLS

The lock is released by screwing in the manual release bolt until the white mark of the lock monitor on the top of the brake cylinder moves to the FREE position. 140 160 180 200 250 Bore size (mm) 125 M6 x 1.0 x 35l M6 x 1.0 x 40l M8 x 1.25 x 40l M10 x 1.5 x 50l M10 x 1.5 x 55l M12 x 1.75 x 70l Manual release bolt Screw depth 30 32 35 40.5 45 55 In the case the manual release bolt is not

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

HRX-OM-M090

Filter Rc1/2 20m HRS-PF003 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #40 Install either the strainer or filter.

HRX-OM-R016

Note 1 Valve Rc1/2 To prevent liquid spillage from the customer's piping or overflow from the tank during maintenance work. 2 Filter Rc1/2 20m HRS-PF003 If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #1000 Install either the strainer

HRX-OM-W038

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 2 Filter Rc1/2 20m HRS-PF003 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #1000 Install either the strainer or filter.

HRX-OM-O021

Filter Rc1/2 20m HRS-PF003 or HRS-PF004 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #40 Install either the strainer or filter.

HRX-OM-R005

Filter Rc1/2 20m HRS-PF003 or HRS-PF004 3 Flow meter 0 to 50L/min 4 Pressure gauge 0 to 1.0MPa 5 Others (pipe, hose, etc.) 15 or more Y-strainer Rc1/2 #40 Install either the strainer or filter.