7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

VZS

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

AC

Accessory (Option)/Part Numbers 0.2 to 1.0MPa Ambient and fluid temperature 2 to 50C (No condensation) Model For VBA2200 For VBA1110-1 For VBA2100 For VBA4100 For VBA4200 Description Lubrication Not required G27-20-R12pcs. G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.

Series VQ Base Mounted Metal Seal/Rubber Seal

Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.1MPa 5 to 50C 2.7mm2 (0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.15MPa 5 to 50C 2.7mm 2 (0.15) 180CPM VVQ1000FPG02 1set VQ1000FPGC6M5D 2pcs.

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x

PSE57  Series Pressure Sensor for General Fluids

Port size Symbol Port size Model PSE570 PSE573 PSE574 PSE575 PSE576 PSE577 01 R1/8 (with M5 female thread) 02 R1/4 (with M5 female thread) For pressure switch precautions and specic product precautions, refer to the Operation Manual on the SMC website.

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

Refrigerated Air Dryer For Use in North, Central and South America

Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) GWP: 20887 Refrigerant charge [oz (g)] 13.7 0.4 (390 10) 18.7 0.4 (530 10) 22.2 0.4 (630 10) 27.5 0.4 (780 10) Auto drain Float type (Normally open, Min. operating pressure: 14.5 psi (0.1 MPa)) Port size Symbol N NPT1 NPT1 1/2 NPT2 Symbol Nil R1 R1 1/2 R2 Drain tube O.D.

Compact Manifold Regulator

Note 2) 5 to 50C when the digital pressure switch will be used.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

SYJ3000/5000/7000

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(B) 2 (B) 2 (A) 4 (A) 4 Number of solenoids Plug Plug Single Double Locked position 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) LOCK PUSH (B) 2 (A) 4 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series 10-SYJ5000) Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

VQ5000

) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1) 3 (R2)

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.