3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

2

VAC (50 Hz) Note 5) Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption (W) 50/60 Hz Note 6) Three-phase 200 V 850/1070 850/1070 1300/1700 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current (A) 50/60 Hz Note 6) Three-phase 200 V 3.3/3.5 3.3/3.5 5.0/5.4 7.2/8.0 Applicable

MHL2

point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100

AC Servo Motor Driver (CC-Link Type)

Check that the main circuit power supply (200 VAC) and controller circuit power supply (200 VAC) are wired correctly. When using the emergency stop SW etc. provided by customer, wire it to the EMG (Forced stop) of the input/output signal(CN6-1). When wiring, I/O connector(LE-CSNA) or I/O cable(LEC-CSNA-1) is required. (EMG (Forced stop) cannot be controlled with CC-Link.)

AC Servo Motor Driver (CC-Link Type)

Configuration Minimum equipment and wiring requirements to get started 1 Provided by customer Ex) 200 V AC (*1) 7 Provided 6 1 by customer 8 2 3 N PC 1 2 5 9 C D 11 21 10 4 (*2) U 2 Electric Actuators Ex) LEF V W Provided by customer 3 PLC (CC-Link master unit) 11 (*1) Refer to LECSC Operation Manual, Chapter 4 for further details if the power supply voltage is 100VAC. (*2) When wiring to

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Servo motor (24 V DC), Step data (points): 64, Actuator/cable type: LEY25AA-400, I/O cable length / communication plug(m): Without I/O cable, Controller/driver mounting method: Screw mounting type

Table of Contents

-X1 to -X5. -X10 . Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) . Precautions. Before Operation .

180

MHF Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease MHL -X4 -X5 -X50 -X53 -X63 -X79 -X79A -X81A Refer to How to Select the Applicable Model on page 700. Refer to pages 700 and 701 for the details on effective holding force and allowable overhanging distance.

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32, 4), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or I/O Cable

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

EXxx-OMY0006CN

EX245-DX1 2Byte Table 11-3 X0 X1 X2 X3 X4 X5 X6 X7 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 72 No.EX##-OMY0006CN 11.5. LED EX245-DX1 LED 0 15 OFF ON Fig. 11-2 EX245-DX1 LED 73 No.EX##-OMY0006CN 11.6.

AC Servo Motor Driver (SSCNET Type)

Power supply is AC200V single phase (Note 4) Controller Forced Alarm forced stop stop ON OFF RA1 RA2 MC MC SK Driver Servo amplifier Servo motor NFB MC CNP1 L1 1-phase 200 to 230VAC CNP3 (Note 6) U 2 L2 U Motor [1] V 3 L3 V M N W 4 W 1 P1 (Note 1) P2 PE CNP2 P (Note 2) C [3] [2] D (Note 3) Encoder CN2 Encoder cable L11 L21 CN3 CN3 24VDC Forced stop EM1 DOCOM (Note 5) DOCOM DICOM (Note 5)

For post-stoppage positioning and locking

30 50 190 117 250 220 200 140 30 60 2 x M8 x 1.25 thread depth 13 (External cover mounting screw) 11.5 4 x 13 through 4 x 11 4 x 20 counterbore depth 8 (Mounting hole) 18 (Clamp block mounting hole) 500.03 2 x 8H7 +0.015 0 14 117 45 23 35 20 140 40 10 118 82 17 15 46 200 170 20 114 436 W-R3-SPosition of fulcrum 2 x 18.5 Proximity switch mounting bracket 74 Proximity switch (Option) 158 65

V100

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

EXxx-OMW0014CN

EX245-DX1 2 . 7-3 X0 X1 X2 X3 X4 X5 X6 X7 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 48 No.EX-OMW0014CN-A 7.5. LED EX245-DX1 LED(16 )(015) 015 OFF OFF ON ON ON . 7-2 EX245-DX1 LED 49 No.EX-OMW0014CN-A 7.6. EX245-DX1 8M12(5 ,) (n+1) (n) FE/ / . 7-3 EX245-DX1 50 No.EX-OMW0014CN-A 8.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work