Process Pump

Fluoropolymer Fittings Hyper Fitting/Flare type Series LQ3 Specifications LQ310 LQ320 LQ330 Model Material Max. operating pressure (at 20C) New PFA 1.0 MPa 0 to 150C 0 to 200C 3 to 25 1/8" to 1 1/4" Nut material: PVDF Operating temperature Nut material: PFA Metric Inch Applicable tube size Refer to Best Pneumatics No. 7 for further details.

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Nut Tubing support Insert bushing Tubing Before tightening Seal locations Excellent heat resistance The use of a nut with locking mechanism and trapezoidal screw threads maximizes seal performance even when subjected to heat cycles, maintaining integrity up to 200C.

LEY-OM007

. -45- 6 /250km /500 1. 2. 3. 2 LEY16*A 2,000km LEY25*A 2,500km LEY32A 4,000km LEY16*B 1,000km LEY25*B 1,200km LEY32B 2,000km LEY16*C 500km LEY25*C 600km LEY32C 1,000km a. b. c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

JXCx-OMU0004

300 2 36 400 18 400 9 400 3 48 500 24 500 12 500 4 60 600 30 600 15 600 5 72 700 36 700 18 700 6 84 800 42 800 21 800 7 100 900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A LEYG32A LEY32B

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: NPN, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32B-150, I/O cable length / communication plug(m): 3, Controller/driver mounting method: DIN rail mounting type

Main Body Peripheral Component: Peripheral Components, Input Power Supply: DC 24V, Position Detection: Incremental, I/O Module: PNP, Motor Type: Step motor (24‑V DC servo), Step data (points): 64, Actuator/cable type: LEY32B-450, I/O cable length / communication plug(m): 1.5, Controller/driver mounting method: DIN rail mounting type

This is a legacy product, and replaced byCD75EB32-200C-B

This is a legacy product, and replaced byCP96SDB32-200C

This is a legacy product, and replaced byCP96SDB32-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, LD, 32MM C95/CP95 DOUBLE-ACTING, 5.20290 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96NDB50-200C, CYL, TIE ROD, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NC, 50MM C95/CP95 OTHERS (COMBO), 5.35723 lb

High Vacuum Angle Valve, XL Series

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

This is a legacy product, and replaced byCP96SDB40-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ME, 40MM C95/CP95 DBL-ACT AUTO-SW, 3.71743 lb

This is a legacy product, and replaced byC96NDB80-200C, 80MM ACNL OTHERS (COMBO), ACTUATOR, ACNL TIE-ROD CYLINDER, RC, 80MM ACNL OTHERS (COMBO), 10.80265 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 5.24210 lb

This is a legacy product, and replaced byC96SDB50-200C, CYL, TIE ROD, ISO, AUTO-S *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.13619 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)C95ISO cylinderC95SDouble acting, Single rod--666

This is a legacy product, and replaced byC96SDB40-200C, CYL, TIE ROD, ISO, AUTO-SW, ACTUATOR, C95/C96 TIE-ROD CYLINDER, ME, 40MM C95/CP95 DBL-ACT AUTO-SW, 3.44472 lb

This is a legacy product, and replaced byCP96SDB50-200C, CYL, PROFILE, ISO, ACTUATOR, C95/C96 TIE-ROD CYLINDER, NE, 50MM C95/CP95 DBL-ACT AUTO-SW, 6.06961 lb

This is a legacy product, and replaced byCP96SDB80-200C-XC68, C(P)96 BASE CYLINDER, ACTUATOR, C95/C96 TIE-ROD CYLINDER, RE, 80MM C95/CP95 DBL-ACT AUTO-SW, 11.11129 lb

This is a legacy product, and replaced byCP96SDB100-200C, CYL, PROFILE, ISO, VDMA *LQA, ACTUATOR, C95/C96 TIE-ROD CYLINDER, SE, 100MM C95/CP95 DBL-ACT AUTO-SW, 12.12542 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CP95ISO cylinderCP95SDouble acting, Single rod--666

This is a legacy product, and replaced byCP96SDB50-200C