Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 450mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 450mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 250mm, Motor: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 30mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 50mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 250mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or

MY1

Example) MY1MW40G-2999L-Z73-XB11 Example) MY1MW40G-300L-Z73-XC67 For ordering dust seal band (NBR lining) only MY 16 B N Bore size Stroke Dust seal band NBR lining Dust seal band hexagon socket head set screw thread Black zinc chromated Nickel plated Nil W Example) MY25-16BNW-300 Refer to "Dust seal band" under the seal parts on the construction page of each series for details. 3 Holder mounting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

FLUID OUT AIR SUP Port size Pilot air supply/ exhaust port 1/4 AIR EXH FLUID IN Liquid contact areas ADC12 SCS14 SCS14 ADC12 Material Diaphragm PTFE, NBR Automatically operated type Check valve PTFE, PFA Discharge rate 1 to 20l/min (0.03 to 0.7SCFM) 5 to 45l/min (0.2 to 1.6SCFM) Average discharge pressure 0 to 0.6MPa (0 to 87psi) Pilot air consumption Maximum 200l/min (ANR) (7SCFM) Maximum 300l

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

2

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Fittings Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

KJ

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

Table of Contents

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3