HRX-OM-W002

BL Option U other than T1/Z/Z1 (CN2) (CN1) 1 1 3 3 2 2 4 4 3 2 1 3 2 1 4 4 2 1 1 3 2 1 6 8 3 5 7 2 4 2 1 1 3 2 USB Board PCB4 Display Board PCB3 BK BR RD RD RD RD BL BK BK RD RD WH Not connected at option Z 24COM AOUT +24V + OUT (CN1) 3 6 2 5 4 1 BR BR BL BL Option DM DI Sensor Level Switch Level Switch Water Leak Sensor BL BR WLS LS1 LS2 Solenoid Valve DI SVDI Option DM BL 11 FWD 12 CM 30C

Aluminum High Vacuum Angle Valve

Leakage rate is measured at room temperature (20 to 30C). XGT CYV Gas permeation This is leakage caused by diffusion through the elastic body seal material. As temperature increases, the diffusion rate increases, and in many cases, becomes greater than surface leakage.

High Vacuum Angle Valve

Leakage rate is measured at room temperature (20 to 30C). XGT CYV Gas permeation This is leakage caused by diffusion through the elastic body seal material. As temperature increases, the diffusion rate increases, and in many cases, becomes greater than surface leakage.

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 5 0 Intake air temperature C (Atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C and 60% humidity is pressurized

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

Supply dry air with a low dew point below 30C. Air dryer series ID is compact and light weight without heater and electric control board. Possible to check the outlet dew point with the indicator.

Supply dry air with a low dew point below 30C. Air dryer series ID is compact and light weight without heater and electric control board. Possible to check the outlet dew point with the indicator.

HRX-OM-W060

Item CH1 CH2 Setting range 15 to 25 20 to 40 CH2 set temperature CH1set By default 20 25 temperature [Tips] Sample set temperature: To change from CH1SP: 25C and CH2SP: 30C status, to CH2SP: 15C, first set CH1SP to 15C and then CH2SP to 15C. If CH2SP is set to 15C before setting CH1SP to 15C, then the following message appears: Please set CH1SP first.

HRX-OM-Y098

Item CH1 CH2 Setting range 5 to 35 10 to 40 CH2 set temperature CH1set By default 20 25 temperature [Tips] Sample set temperature: To change from CH1SP: 25C and CH2SP: 30C status, to CH2SP: 15C, first set CH1SP to 15C and then CH2SP to 15C. If CH2SP is set to 15C before setting CH1SP to 15C, then the following message appears: Please set CH1SP first.

HRX-OM-X037

Item CH1 CH2 Setting range 5 to 35 10 to 40 CH2 set temperature CH1set By default 20 25 temperature [Tips] Sample set temperature: To change from CH1SP: 25C and CH2SP: 30C status, to CH2SP: 15C, first set CH1SP to 15C and then CH2SP to 15C. If CH2SP is set to 15C before setting CH1SP to 15C, then the following message appears: Please set CH1SP first.

modular-press-e

Air Filter + Mist Separator + Regulator ACG20C/30C/40C Options/Attachments Part No. Options/Attachments part no. ACG20C ACG30C ACG40C Model Description Pressure gauge Note 1) 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional N.C. N.O.

smcmaintenancepartslist

Air Filter + Mist Separator + Regulator ACG20C/30C/40C Options/Attachments Part No. Options/Attachments part no. ACG20C ACG30C ACG40C Model Description Pressure gauge Note 1) 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional N.C. N.O.

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (accessory) K M Square embedded type pressure gauge (accessory) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (accessory) K M Square embedded

IDU/IDF

Condensed water calculation Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 1.0 18.2 3.0 = 15.2g/m 20 1.5 15 10 5 3.0 0 20 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C [Example] If air at 30C

Stainless Steel Heat

Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) K M Square embedded type pressure gauge (Option) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (Option) K M Square embedded type pressure

id_idw_and_ida_series_air_dyers

Standard dew point 22F (30C) Adsorbent set for standard dew point 4.7 4.7 6.7 6.7 ID-200S ID-300S ID-400S ID-600S Dimensions 240 240 320 320 9.4 9.4 12.6 12.6 520 615 850 961 Heatless Air Dryer Series ID AM150-N02 AM250-N04 AM250-N04 AM350-N06 Mist separator Model Compact and light weight without heater and electric control board 20.5 24.2 33.5 37.8 110V Single-Phase 60hz Bracket 6604113

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) K M Square embedded type pressure gauge (Option) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (Option) K M Square embedded type pressure

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Atmospheric pressure 45 Relative humidity 100% 40 0.1MPa Amount of water in air g /m3 35 80% 60% 0.2 40% 0.3 0.4 0.5 30 0.6 0.7 0.8 25 Amount of condensed water 20% 3 8 1.0 18.2 3.0 = 15.2g/m3 20 2 3 4 1.5 15 10 5 8 7 3.0 1 6 0 5 Intake air temperature C (atmospheric pressure) Air temperature (Pressure dew point) C -20 -10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 70 80 [Example] If air at 30C

Mechanical Valves Series NVM, NVFM, NVZNI

Td_i ACTUATOR SUB ASSEMBLIES NYTMZJV Pa.t# trYZil4SU Patl# Cam Lever Acetal vM-01c vM-o1c Cam Lever teel VM.O1 VM-OICS Cam Lever One-wav Acetal vM-02c vM-02c Cam Lever One-Way Steel vM-02c VM-O2CS Descrlptlon HOI|T Matorial M5 x0.8 Plunqer VM.OsD vM-05c Roller Plunoer In Line Acetal VM.06D vM-06c Roller Plunger In Line Steel VM.O6DS VM.O6CS Tooqle Lever vM-080 VM.O8C Push Button-MushroomvM-30c